Ultrathin SST Die Structure With Integrated Growth Support

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

The existing methods for manufacturing solid state transducer (SST) dies, such as LEDs, are costly and inefficient due to the complete removal of the growth substrate, which adds time and material costs, and the use of thick support substrates that increase device thickness and production costs.

Innovation Solution

The use of engineered growth substrates that also serve as permanent support structures, eliminating the need for a separate support substrate and reducing material and processing costs, while maintaining the optical and electrical properties of the SST die.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If the growth substrate is completely removed to improve optical properties, then light emission is improved, but manufacturing cost and processing time increase

Engineering Contradiction:
Improvelight emissionVSAvoidmanufacturing efficiency
Core Design Contradiction:
Illumination intensityVSProductivity

Solution Approach 1:

The patent combines the growth substrate and support substrate into a single integrated substrate that serves both functions: supporting the epitaxial layers during growth and providing optical transparency for light emission. This eliminates the need to completely remove the substrate after growth, resolving the contradiction between improving light emission and maintaining manufacturing efficiency.

Inventive Principle:
Principle #5Merging (Combining)

2Strength

If a separate support substrate is attached to support the epitaxial layers, then structural support is improved, but device thickness and material cost increase

Engineering Contradiction:
Improvestructural supportVSAvoiddevice thickness
Core Design Contradiction:
StrengthVSLength of stationary object

Solution Approach 1:

The patent merges the support function into the growth substrate itself by engineering the substrate to have both mechanical strength for supporting delicate epitaxial layers and optical transparency for light emission. This eliminates the need for a separate thick support substrate, reducing overall device thickness while maintaining structural integrity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The engineered substrate performs multiple functions simultaneously: it serves as the growth platform for epitaxial layers, provides mechanical support, and enables optical transmission. This multi-functionality eliminates the need for separate support substrates and reduces device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Illumination intensity

If the growth substrate is completely removed, then optical properties are improved, but material cost and processing complexity increase

Engineering Contradiction:
Improveoptical propertiesVSAvoidprocessing complexity
Core Design Contradiction:
Illumination intensityVSDevice complexity

Solution Approach 1:

The patent merges the growth and support functions into a single substrate, eliminating the complex process of attaching a separate support substrate and completely removing the original growth substrate. The integrated substrate remains in place, providing both mechanical support and optical transparency, thereby simplifying the manufacturing process.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The engineered substrate is designed to perform multiple functions: supporting epitaxial growth and enabling light emission. This multi-functionality eliminates the need for separate support substrates and complex bonding/removal processes, reducing manufacturing complexity while maintaining optical performance.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS12206046B2Ultrathin solid state dies and methods of manufacturing the same
Publication Date: 2025.01.21 MICRON TECHNOLOGY INC
  • US12206046B2 patent drawing
  • US12206046B2 patent drawing
  • US12206046B2 patent drawing

AI summary

Various embodiments of SST dies and solid state lighting (“SSL”) devices with SST dies, assemblies, and methods of manufacturing are described herein. In one embodiment, a SST die includes a substrate material, a first semiconductor material and a second semiconductor material on the substrate material, an active region between the first semiconductor material and the second semiconductor material, and a support structure defined by the substrate material. In some embodiments, the support structure has an opening that is vertically aligned with the active region.