Semiconductor Package Under Bump Interconnection Layer Trenches

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Solution Overview

Problem

Current semiconductor packages face challenges in achieving high reliability, miniaturization, and increased integration density due to limitations in packaging design and manufacturing methods.

Innovation Solution

The semiconductor package design incorporates a redistribution substrate with an under bump interconnection layer, electronic devices, and solder bumps, featuring a passivation layer with trenches that inhibit underfill layer flow and enhance interface contact, thereby improving reliability and allowing for miniaturization and higher integration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the package size is reduced to meet miniaturization demands, then integration density improves, but reliability deteriorates due to increased stress and thermal issues

Engineering Contradiction:
Improvepackage sizeVSAvoidpackage reliability
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The package structure is segmented into multiple functional layers including substrate, under bump interconnection layer, passivation layer, and solder bump layer. This segmentation allows each layer to be optimized independently for its specific function while maintaining overall package integrity and reliability despite reduced size

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from planar 2D layout to 3D vertical stacking by adding the under bump interconnection layer between the substrate and solder bumps. This dimensional change enables increased integration density without proportionally increasing package footprint, thereby maintaining reliability in smaller packages

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If integration density is increased to improve functionality, then device capability improves, but manufacturing complexity increases

Engineering Contradiction:
Improveintegration densityVSAvoidmanufacturing complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The under bump interconnection layer is formed on the substrate before mounting the solder bumps. This preliminary action simplifies subsequent assembly steps and enables higher integration density by pre-establishing the interconnection architecture, thereby reducing overall manufacturing complexity despite increased integration requirements

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The passivation layer is selectively applied to specific regions where needed for insulation and protection, rather than uniformly across the entire surface. This localized approach enables higher integration density in critical areas while simplifying manufacturing in less critical regions

Inventive Principle:
Principle #3Local quality

3Area of stationary object

If solder bumps are placed closer to electronic devices to reduce pitch, then integration density improves, but delamination risk increases

Engineering Contradiction:
Improvepitch between solder bumpsVSAvoiddelamination resistance
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The under bump interconnection layer acts as an intermediary between the substrate and solder bumps, providing mechanical support and stress distribution. This intermediary structure enables closer placement of solder bumps while maintaining delamination resistance, thereby achieving higher integration density without sacrificing reliability

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The passivation layer is applied beforehand to protect the under bump interconnection layer and conductive patterns from environmental damage and mechanical stress. This protective cushioning enables closer spacing of solder bumps while maintaining reliability by preventing stress-induced delamination

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Data Source

PatentUS20230115957A1Semiconductor packages
Publication Date: 2023.04.13 SAMSUNG ELECTRONICS CO LTD
  • US20230115957A1 patent drawing
  • US20230115957A1 patent drawing
  • US20230115957A1 patent drawing

AI summary

A semiconductor package includes a redistribution substrate having a first surface and a second surface which are opposite to each other, a semiconductor chip mounted on the first surface of the redistribution substrate, an under bump interconnection layer on the second surface of the redistribution substrate, an electronic device mounted on the under bump interconnection layer, and a solder bump disposed on the under bump interconnection layer and horizontally spaced apart from the electronic device. The under bump interconnection layer includes conductive patterns respectively connected to the electronic device and the solder bump, and a passivation layer covering the conductive patterns. The passivation layer includes a plurality of trenches disposed between the electronic device and the solder bump.