Undercoat Agent for Block Copolymer Phase Separation
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Solution Overview
Problem
Existing methods for forming fine patterns using phase-separated block copolymers require precise control of surface free energy for the neutral layer, and the heat-crosslinking of underlayer films can lead to increased film thickness, complicating the process and necessitating a simpler and more flexible approach for nanostructure formation on substrates.
Innovation Solution
An undercoat agent containing a resin component with specific structural units, including aromatic and aliphatic rings, and a substrate interaction group, which allows for phase separation without controlling surface free energy and forms a thin, easily removable film, enabling flexible positioning and orientation of nanostructures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a neutral layer with controlled surface free energy is formed to enable phase separation of block copolymer, then favorable phase separation is achieved, but the process complexity increases due to precise surface free energy control requirements
Solution Approach 1:
The patent employs an undercoat agent that forms a thin film specifically designed to be removed after serving its purpose of enabling phase separation. This disposable approach simplifies the overall process by eliminating the need for precise surface free energy control of permanent layers, as the undercoat agent is discarded after facilitating the phase separation of the block copolymer layer.
2Strength
If heat-crosslinking is applied to the underlayer film to improve its properties, then the film strength increases, but the film thickness increases which affects subsequent processing steps
Solution Approach 1:
The patent applies heat-crosslinking to the undercoat agent film to modify its physical and chemical properties, transforming it into a more stable structure that can be easily removed afterward. This parameter change (thermal treatment) strengthens the film's structural integrity during processing while maintaining controllability over its final state for removal.
Solution Approach 2:
The undercoat agent is applied and heat-crosslinked in advance before the block copolymer phase separation process. This preliminary action prepares the surface in advance to facilitate the subsequent phase separation, and the crosslinked structure enables easier removal after serving its function.
3Area of stationary object
If an undercoat agent forms a thicker film to improve coverage, then the coverage is improved, but the removal of the undercoat layer becomes more difficult
Solution Approach 1:
The patent utilizes heat-crosslinking as a parameter change to transform the undercoat agent's properties. The crosslinked structure provides sufficient coverage and adhesion during the phase separation process, but also creates a defined chemical structure that facilitates controlled removal after its function is complete.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The undercoat agent facilitates the formation of nanostructures with improved positioning and orientation control, reduces the impact on subsequent processing steps, and simplifies the removal of the undercoat layer, enhancing the overall pattern formation process for block copolymer layers.
Implementation Method 1
used for phase separating a layer including a block copolymer having a plurality of blocks bonded formed on a substrate
Implementation Method 2
the resin component includes a group which can interact with the substrate
Data Source
AI summary
An undercoat agent including a block copolymer having a plurality of blocks bonded formed on a substrate. The undercoat agent contains a resin component that includes a structural unit having an aromatic ring and a structural unit having no aromatic ring, and the resin component includes a group which can interact with the substrate and does not include a 3 to 7-membered, ether-containing cyclic group; and a method of forming a pattern of a layer containing a block copolymer. The method includes applying an undercoat agent to a substrate to form a layer containing the undercoat agent; forming a layer containing a block copolymer having multiple blocks bonded on a surface of the layer containing the undercoat agent, followed by a phase separation of the layer containing the block copolymer; and selectively removing a phase containing at least one block of multiple blocks constituting the block copolymer.