Undercut Thermo-Optic Phase Shifter for Low-Power Phase Control
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Solution Overview
Problem
Optical data communication systems face challenges in controlling the phase of light for reliable and efficient operation, particularly in applications involving optical data communication and optical analog modulation, where existing technologies are inadequate in managing phase shifts effectively.
Innovation Solution
A thermo-optic phase shifter is designed with a substrate, optical waveguide, and heater devices to control the phase of light by adjusting the temperature of the waveguide through thermal energy injection, utilizing a cavity beneath the phase shifter to enhance thermal isolation and efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If conventional phase shifting methods are used, then phase control is achieved, but energy consumption is high and thermal efficiency is poor
Solution Approach 1:
The patent introduces a vertical cavity dimension beneath the waveguide, transitioning from a planar to a three-dimensional thermal management structure. This cavity provides a dedicated thermal escape path in the vertical dimension, separating heat dissipation from the horizontal integration plane, thereby improving thermal efficiency without compromising phase control reliability
Solution Approach 2:
The thermal management function is segmented from the optical waveguide structure. The cavity acts as a dedicated thermal management component, separating heat dissipation functions from the optical path, allowing independent optimization of both optical performance and thermal efficiency
2Loss of energy
If thermal isolation is improved, then thermal efficiency increases, but device structure becomes more complex
Solution Approach 1:
The cavity structure serves multiple functions simultaneously: it provides thermal isolation, defines the thermal management region, and can be integrated with existing CMOS fabrication processes. This multi-functionality achieves improved thermal efficiency without proportionally increasing structural complexity
Solution Approach 2:
The patent optimizes the cavity depth as a key parameter to achieve the desired thermal isolation effect. By carefully controlling the cavity depth parameter, sufficient thermal efficiency is achieved while maintaining compatibility with standard fabrication processes and avoiding excessive structural complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The thermo-optic phase shifter provides precise control over light phase shifts with reduced energy consumption and improved thermal efficiency, enhancing the reliability and performance of optical data communication systems.
Implementation Method 1
heater device disposed along a lateral side of the optical waveguide. The heater device extends across and above the cavity
Implementation Method 2
utilizing a cavity beneath the phase shifter to enhance thermal isolation and efficiency
Data Source
AI summary
A thermo-optic phase shifter includes a substrate having a cavity formed into an upper region of the substrate. The thermo-optic phase shifter includes an optical waveguide disposed above the substrate. The optical waveguide extends across and above the cavity. The thermo-optic phase shifter also includes a heater device disposed along a lateral side of the optical waveguide. The heater device extends across and above the cavity. The cavity is formed by an undercut etching process after the optical waveguide and the heater device is formed. The optical waveguide can be formed to include one or more segments that pass over the cavity. Also, a second heater device can be included such that the one or more segments of the optical waveguide that extend over the cavity are bracketed by heater devices. Thermal transmission structures can be included to enhance heat transfer between the heater device(s) and the optical waveguide.