Underlayer Composition for Directed Self-Assembly

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Solution Overview

Problem

Existing polymer compositions for underlayers in directed self-assembly of block copolymers are less effective in matching interaction properties with styrenic monomer repeat units, particularly in terms of thermal crosslinkability and surface interaction.

Innovation Solution

A novel underlayer formulation comprising a polymer with specific monomer repeat units, thermal acid generators, and a solvent, which includes crosslinking groups and thermal acid generators to enhance thermal crosslinking and surface interaction properties, facilitating the formation of self-assembled structures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If epoxy-based crosslinked polymers are used as underlayers, then thermal crosslinkability is improved, but surface interaction properties deteriorate (less effective in matching interaction properties of styrenic monomer repeat units)

Engineering Contradiction:

Improvethermal crosslinkabilityVSAvoidsurface interaction matching

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

The patent changes the chemical parameters of the polymer by incorporating styrenic monomer repeat units (structures I-IV) that closely match the interaction properties of styrene-based block copolymers. This parameter change maintains effective surface interactions while the patent simultaneously introduces crosslinkable functional groups to achieve thermal crosslinkability, thus resolving the contradiction between surface interaction matching and thermal crosslinkability

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The underlayer composition uses a composite polymer structure combining styrenic monomer repeat units for surface interaction matching with crosslinkable functional groups for thermal crosslinking. This composite approach integrates both required properties - the styrenic units provide compatibility with block copolymer surfaces while the crosslinkable groups enable thermal stabilization through crosslinking

Inventive Principle:

Principle #40Composite materials

2Stability of the object's composition

If crosslinking functionality is incorporated into underlayer polymers, then thermal stability is improved, but comingling between underlayer and block copolymer increases (crosslinking retards comingling)

Engineering Contradiction:

Improvethermal stabilityVSAvoidcomingling between layers

Core Design Contradiction:

Stability of the object's compositionVSStrength

Solution Approach 1:

The patent applies preliminary crosslinking action by incorporating crosslinkable functional groups into the underlayer polymer structure before the actual self-assembly process. This preliminary preparation allows controlled crosslinking to occur, providing thermal stability while the styrenic monomer units maintain the ability to interact with and guide block copolymer assembly, thus resolving the contradiction between thermal stability and layer interaction strength

Inventive Principle:

Principle #10Preliminary action

3Stability of the object's composition

If existing crosslinked polymers are used, then structural stability is improved, but manufacturing precision deteriorates (less effective in promoting precise self-assembled structures)

Engineering Contradiction:

Improvestructural stabilityVSAvoidself-assembly precision

Core Design Contradiction:

Stability of the object's compositionVSManufacturing precision

Solution Approach 1:

The patent changes the chemical composition parameters by using styrenic monomer repeat units that match the interaction properties of styrene-based block copolymers. This parameter change enables precise self-assembly by ensuring compatible surface interactions, while the incorporated crosslinkable functional groups provide structural stability, thus resolving the contradiction between structural stability and self-assembly precision

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The formulation promotes the formation of precise self-assembled structures with improved thermal stability and surface interaction, enabling effective directed self-assembly of block copolymers with enhanced pattern multiplication and control.

Implementation Method 1

at least one thermal acid generator

Methodology Applied

Scientific EffectThermal decomposition: Thermolysis

Implementation Method 2

a polymer comprising at least one monomer repeat unit having the structure (I) wherein X is a crosslinking group

Methodology Applied

Scientific EffectCrosslinking: Chemical Bonding

Implementation Method 3

molecular interactions drive phase separation into domains; wherein immiscible polar and nonpolar materials are concentrated

Methodology Applied

Scientific EffectPhase separation:

Data Source

PatentEP3084522B1Underlayer composition for promoting self assembly and method of making and using the same

Publication Date: 2020.09.09 MERCK PATENT GMBH

Figure 1(a)~1(b)
Figure 2
Figure 3

AI summary

Disclosed herein is an underlayer composition, wherein the underlayer is typically used for promoting the formation of self assembled structures, and wherein the underlayer formulation comprises: (a) a polymer comprising at least one monomer repeat unit having the structure (I) wherein X is a crosslinking group chosen from formulae (II), (III), (IV), (V) and wherein n is 0-5, p is 0-5, q is 1-2, m is 1-2 and R is H, C1-C4alkyl or tri (C1- C4alkyl)silyl; (b) at least one thermal acid generator; and (c) a solvent. The invention further relates to methods of making and using the composition.