Underlayer Film Composition for Nanoimprint Flatness
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Solution Overview
Problem
The adhesiveness between a substrate and a curable composition for imprints is inadequate, leading to separation issues during the nanoimprint process, as the underlying layer exhibits poor surface flatness due to large cure contraction using low molecular methylol-base curing agents.
Innovation Solution
A composition comprising a resin with ethylenic unsaturated groups and cyclic ether groups, such as oxiranyl or oxetanyl, is used to form an underlying layer, which undergoes a ring-opening reaction with small volume contraction, improving surface flatness and adhesiveness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If low molecular methylol-base curing agents are used, then adhesiveness is improved, but surface flatness deteriorates due to large cure contraction
Solution Approach 1:
The patent changes the chemical parameters of the curing agent from low molecular methylol-base to cyclic ether-based compounds (oxirane or oxetane structures), which fundamentally alters the curing mechanism to achieve small-volume contraction while maintaining adhesiveness
Solution Approach 2:
The patent creates a composite curing system combining cyclic ether compounds with specific resin components (polyester polyol, polyether polyol, or carboxylic acid) to achieve both strong adhesion and minimal surface contraction
2Strength
If conventional curing agents are used, then adhesiveness improves, but separation failures occur due to poor surface flatness
Solution Approach 1:
The patent modifies the curing agent parameters to use cyclic ether compounds with specific molecular structures that undergo ring-opening polymerization, fundamentally changing the volume contraction characteristics to prevent separation failures
Solution Approach 2:
The patent preemptively addresses separation issues by selecting curing agents with inherently small volume contraction ratios, cushioning against the risk of separation failure before it occurs during the imprinting process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides an underlying layer with enhanced adhesiveness to the imprinted layer, reducing separation failures and maintaining good surface flatness, even at low temperatures.
Implementation Method 1
a resin having an ethylenic unsaturated group (P), and a cyclic ether group (T) selected from oxiranyl group and oxetanyl group
Implementation Method 2
a resin having an ethylenic unsaturated group (P), and a cyclic ether group (T) selected from oxiranyl group and oxetanyl group
Data Source
AI summary
Provided is a composition for forming underlying layer for imprints, which is excellent in surface flatness and adhesiveness. The composition for forming underlying layer for imprints comprises (A) a resin having an ethylenic unsaturated group (P), and a cyclic ether group (T) selected from oxiranyl group and oxetanyl group, and having a weight-average molecular weight of 1000 or larger; and, (B) a solvent.