Uneven-Surface Member With Carbon-Gradient Protective Coating

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Solution Overview

Problem

Polytetrafluoroethylene water-repellent coatings exhibit low adhesion to fine-uneven structures, leading to peeling during surface wiping, and conventional oxide or nitride protective coatings lack sufficient water resistance.

Innovation Solution

A protective coating with a higher carbon content at the surface layer than the inside is applied over a base with a fine-uneven structure, using atomic layer deposition (ALD) to ensure adhesion and enhance water resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a polytetrafluoroethylene water-repellent coating is formed over the fine-uneven structure, then water resistance is improved, but adhesion deteriorates causing peeling during wiping

Engineering Contradiction:
Improvewater resistanceVSAvoidadhesion
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The patent applies a composite coating structure consisting of an oxide or nitride layer (such as silicon oxide, aluminum oxide, titanium oxide, silicon nitride, or aluminum nitride) formed over the fine-uneven structure. This composite approach combines the adhesion benefits of oxide/nitride materials with the water-repellent properties achieved through controlled carbon content distribution, resolving the contradiction between water resistance and adhesion exhibited by polytetrafluoroethylene coatings alone.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent implements local quality by creating a carbon content gradient within the oxide or nitride coating layer. The surface layer contains higher carbon content (0.1-5.0 at%) to provide water resistance, while the inner layer contains lower carbon content (0.01-1.0 at%) to ensure adhesion to the fine-uneven structure. This spatial differentiation of carbon content allows simultaneous achievement of both water repellency and strong adhesion.

Inventive Principle:
Principle #3Local quality

2Strength

If an oxide or nitride protective coating is formed over the fine-uneven structure, then adhesion is improved, but water resistance deteriorates

Engineering Contradiction:
ImproveadhesionVSAvoidwater resistance
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent resolves this contradiction by implementing a carbon content gradient within the oxide or nitride coating. The inner layer maintains low carbon content (0.01-1.0 at%) to ensure strong adhesion to the fine-uneven structure, while the surface layer contains higher carbon content (0.1-5.0 at%) to provide water resistance. This local differentiation of carbon content allows the coating to simultaneously achieve both adhesion and water repellency.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent applies parameter changes by controlling the carbon content distribution as a gradient parameter through the coating thickness. By adjusting carbon content from low in the inner layer to high in the surface layer, the coating transitions from an adhesive interface to a water-repellent surface, effectively resolving the contradiction between adhesion strength and water resistance.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The coating provides improved adhesion to the base and enhances water resistance, preventing peeling and maintaining antireflection properties under environmental stress.

Implementation Method 1

using atomic layer deposition (ALD) to ensure adhesion and enhance water resistance

Methodology Applied
Scientific EffectAtomic layer deposition: Chemical Vapour Deposition

Implementation Method 2

The layer has a higher carbon content at a surface than on an inside... enhances water resistance

Methodology Applied
Scientific EffectHydrophobicity: Hydrophobe

Data Source

PatentUS20250306250A1Member and method for manufacturing the same
Publication Date: 2025.10.02 CANON KK
  • US20250306250A1 patent drawing
  • US20250306250A1 patent drawing

AI summary

A member includes a base having a surface with an uneven structure, and a layer containing an oxide or a nitride over the uneven structure of the base. The layer has a higher carbon content at a surface than on an inside.