Unified APT and TEM Data for Atomic-Scale Imaging

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Solution Overview

Problem

Current atom probe tomography (APT) and transmission electron microscopy (TEM) techniques face challenges in achieving atomic-scale resolution due to detector efficiency, trajectory aberrations, non-uniform magnification, and limited compositional information, leading to incomplete and inaccurate data reconstruction, while TEM/STEM methods struggle with the 'inverse problem' and 'projection criterion', resulting in limited 3D imaging capabilities.

Innovation Solution

Combining APT and TEM data into a unified dataset, using APT data to improve TEM image simulations by providing compositional and crystallographic information, and vice versa, to enhance data accuracy and reduce reconstruction artifacts, and employing the Spatial Distribution Map (SDM) to quantify and correct aberrations in APT images.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of information

If atom probe tomography is used to achieve atomic-level analysis, then compositional information and 3D mapping capability are improved, but detector efficiency and trajectory aberrations degrade measurement precision

Engineering Contradiction:
Improvecompositional informationVSAvoidspatial resolution
Core Design Contradiction:
Loss of informationVSMeasurement precision

Solution Approach 1:

The patent combines atom probe tomography data with transmission electron microscopy data into a unified dataset, merging the compositional information strength of APT with the spatial resolution strength of TEM to overcome the limitations of each individual technique

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent uses an iterative refinement process where TEM images serve as an intermediary to guide APT data reconstruction, and APT compositional data serves as an intermediary to improve TEM image simulation, allowing each technique to compensate for the other's deficiencies

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If transmission electron microscopy is used to achieve atomic resolution imaging, then spatial resolution is improved, but 3D imaging capability and compositional information are limited

Engineering Contradiction:
Improvespatial resolutionVSAvoidcompositional information
Core Design Contradiction:
Measurement precisionVSLoss of information

Solution Approach 1:

The patent merges TEM spatial resolution data with APT compositional data to create a unified dataset that contains both high spatial resolution and complete compositional information that neither technique can provide alone

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent adds the compositional dimension to TEM imaging by integrating APT data, transforming 2D spatial information into 3D compositional mapping capability while maintaining atomic-scale resolution

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Productivity

If atom probe data reconstruction is performed without corrections, then processing speed is improved, but reconstruction accuracy is degraded due to aberrations and magnification errors

Engineering Contradiction:
Improvedata processing speedVSAvoidreconstruction accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent performs preliminary corrections for trajectory aberrations and non-uniform magnification during the data reconstruction process, establishing accurate reference frameworks before final image generation to enable both speed and accuracy

Inventive Principle:
Principle #10Preliminary action

4Quantity of substance

If multiple layers of different atomic species are analyzed by atom probe, then compositional diversity is improved, but preferential evaporation and specimen fracture increase

Engineering Contradiction:
Improvecompositional diversityVSAvoidspecimen stability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent uses TEM imaging as an intermediary to characterize the specimen structure before APT analysis, allowing optimization of analysis parameters to prevent preferential evaporation and specimen fracture when analyzing multiple atomic species

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach increases the accuracy and speed of TEM structural model generation, improves spatial resolution, and allows for more precise visualization and classification of materials at the atomic level by integrating complementary data sets and correcting for reconstruction errors.

Implementation Method 1

a positive electrical pulse (above the baseline voltage) and/or a laser pulse (e.g., photonic energy) are intermittently applied to the specimen. Occasionally (e.g., one time in 10 to 100 pulses) a single atom is ionized near the tip of the specimen. The ionized atom(s) separate or 'evaporate' from the surface

Methodology Applied
Scientific EffectField evaporation:

Implementation Method 2

The elemental identity of an ionized atom can be determined by measuring its time of flight (TOF) from the surface of the specimen to the detector, which varies based on the mass-to-charge-state ratio (m/z) of the ionized atom

Methodology Applied
Scientific EffectTime of flight measurement: Time of Flight

Implementation Method 3

The location of the ionized atom on the surface of the specimen can be determined by measuring the location of the atom's impact on the detector

Methodology Applied
Scientific EffectPosition detection:

Implementation Method 4

Transmission electron microscopy (TEM) is a technique wherein electrons are transmitted through a very thin specimen and the interactions between the electrons and the specimen are detected by various means

Methodology Applied
Scientific EffectElectron transmission: Electron Beam

Data Source

PatentUS8670608B23D atomic scale imaging methods
Publication Date: 2014.03.11 IMAGO SCIENTIFIC INSTRUMENTS CORP
  • US8670608B2 patent drawing
  • US8670608B2 patent drawing
  • US8670608B2 patent drawing

AI summary

The present invention is directed generally toward atom probe and TEM data and associated systems and methods. Other aspects of the invention are directed toward combining APT data and TEM data into a unified data set. Other aspects of the invention are directed toward using the data from one instrument to improve the quality of data obtained from another instrument.