Temperature control system for liquid sources
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional semiconductor manufacturing systems require separate hardware for heating and cooling liquid sources, leading to delays and increased costs when switching between temperature control ranges, which is inefficient and disruptive to processing.
Innovation Solution
A unified heating and cooling apparatus is used to maintain the temperature of liquid sources within a specific range by concurrently or sequentially operating cooling and heating assemblies, allowing for precise temperature control without hardware changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If separate heating and cooling hardware is used for liquid sources, then temperature control capability is improved, but device complexity and processing time increase when switching between temperature ranges
Solution Approach 1:
The patent combines separate heating and cooling hardware into a single integrated temperature control system. The unified apparatus includes both heating elements and cooling mechanisms within one device, allowing it to perform both functions depending on the required temperature range, thereby reducing the number of separate hardware components needed.
Solution Approach 2:
The temperature control system is designed as a universal device that can operate in multiple modes: cooling mode for temperatures below room temperature, heating mode for temperatures above room temperature, and combination mode for enhanced control. This multi-functional design eliminates the need for separate dedicated heating and cooling hardware.
2Temperature
If hardware is switched between cooling and heating modes, then temperature control range is improved, but productivity decreases due to delays and work efforts
Solution Approach 1:
The unified temperature control system is pre-configured with both heating and cooling capabilities integrated and ready to operate. The controller can immediately switch between cooling and heating modes without requiring physical hardware changes, eliminating delays associated with hardware switching and maintaining continuous processing productivity.
3Measurement precision
If separate cooling and heating hardware is implemented, then temperature control precision is improved, but ease of operation deteriorates due to hardware changes
Solution Approach 1:
The system employs dynamic mode switching capability where the controller automatically selects between cooling and heating modes based on the desired temperature setpoint. This dynamic operation allows the system to maintain precise temperature control while simplifying user interaction, as operators only need to specify the target temperature without manually configuring hardware.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise temperature control with reduced hardware configurations, minimizing delays and costs, and enhancing processing efficiency by eliminating the need to switch hardware during temperature changes.
Implementation Method 1
a cooling mechanism operable to cool the first body
Implementation Method 2
a heating mechanism operable to heat the second body
Implementation Method 3
a temperature sensor positioned within the interior space and configured to measure a temperature of the liquid source
Data Source
AI summary
A reactor system for use in semiconductor processing that makes use of a liquid source for deposition that needs to be maintained within a specific temperature control band or range. The reactor system includes a temperature control system that includes a heating and cooling apparatus for providing both heating and cooling of a vessel that stores the liquid source to maintain the liquid source within a desired temperature control band or range. In this manner, the heating and cooling apparatus may be used in a reactor system in which the vessel needs to be cooled, needs to be heated, or uses concurrent or alternating heating and cooling to provide enhanced control of the source temperature within a particular temperature control band.