Unified Parts Database for Semiconductor Manufacturing

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional semiconductor manufacturing apparatuses face discrepancies in managing parts information across multiple databases, leading to inaccuracies in tracking parts usage and lifespan, which can result in semiconductor process failures and operational inefficiencies.

Innovation Solution

A manufacturing apparatus with a parts identification information receiving unit, a parts attribute information receiving unit, and a parts attribute corresponding information managing unit that updates and stores information about parts, including use history and lifespan data, ensuring accurate and unified management of parts attributes across the system.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If multiple separate databases are used to manage parts information (order database, shipping database, maintenance database), then each database can be independently managed and maintained, but discrepancies and inconsistencies arise between parts information stored in different databases

Engineering Contradiction:
ImproveIndependent database managementVSAvoidParts information consistency
Core Design Contradiction:
Ease of operationVSLoss of information

Solution Approach 1:

The patent merges multiple separate databases (order database, shipping database, maintenance database) into a single unified database that stores all parts information in one location. This unified database receives parts information from various sources and maintains a single consistent record for each part, eliminating the discrepancies that arise from managing separate databases independently.

Inventive Principle:
Principle #5Merging (Combining)

2Adaptability or versatility

If parts information is stored in separate databases for different functions (ordering, shipping, maintenance), then each functional area can manage its own data, but the overall accuracy and reliability of parts information decreases

Engineering Contradiction:
ImproveFunctional database independenceVSAvoidParts information accuracy
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent combines multiple functional databases into one unified database that serves all functional areas (ordering, shipping, maintenance). This unified database maintains reliable and accurate parts information by storing each part's data in a single location that can be accessed and updated by all functional areas, ensuring consistency across the entire system.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The unified database is designed to serve multiple functions simultaneously - it handles ordering information, shipping records, and maintenance data all in one system. This multi-functional database can be accessed by different departments and systems, providing universal access to accurate parts information while maintaining data integrity across all uses.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Ease of manufacture

If parts are tracked using conventional separate database systems, then implementation is simpler with existing systems, but tracking accuracy and lifespan management become unreliable

Engineering Contradiction:
ImproveDatabase system implementationVSAvoidParts usage tracking accuracy
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The patent implements a unified database system that consolidates parts tracking information from ordering, shipping, and maintenance records into a single accurate tracking mechanism. By merging these previously separate tracking functions into one system, the patent achieves high tracking accuracy while maintaining reasonable implementation complexity through standardized database operations.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS7941295B2Manufacturing apparatus, information processing method, and program
Publication Date: 2011.05.10 TOKYO ELECTRON LTD
  • US7941295B2 patent drawing
  • US7941295B2 patent drawing
  • US7941295B2 patent drawing

AI summary

Provided is a manufacturing apparatus for appropriately managing information about parts of the manufacturing apparatus. The manufacturing apparatus includes: a parts identification information receiving unit receiving parts identification information used to identify parts of the manufacturing apparatus for performing a semiconductor process with respect to a substrate to be processed; a parts attribute information receiving unit receiving parts attribute information indicating the attribute of the parts identified by the received parts identification information; a parts attribute corresponding information memory unit storing parts attribute corresponding information where the parts identification information identifying the parts of the manufacturing apparatus corresponds to parts attribute information identified by the parts identification information; and a parts attribute corresponding information managing unit updating the parts attribute corresponding information by using the received parts identification information and the received parts attribute information.