Uniform SRAM Bit Cell Layouts for Smaller Technology Nodes

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Solution Overview

Problem

Conventional fabrication processes for integrated circuits face challenges in scaling to smaller feature sizes, particularly for multi-gate transistors, due to variability and compatibility issues with existing infrastructure.

Innovation Solution

The development of uniform layouts for SRAM and register file bit cells, which are compatible with advanced self-aligned process technologies, allowing for more efficient use of space and reduced process risks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional fabrication processes are used for multi-gate transistors, then compatibility with existing infrastructure is maintained, but scaling to smaller feature sizes is limited due to variability

Engineering Contradiction:
Improvefeature size scaling precisionVSAvoidprocess variability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent changes the physical parameters of the transistor layout by introducing dummy gates and adjusting gate line configurations. This modifies the electrical and physical characteristics of the multi-gate transistors to achieve better scaling precision while maintaining process compatibility, directly addressing the contradiction between manufacturing precision and reliability

Inventive Principle:
Principle #35Parameter changes

2Quantity of substance

If feature sizes are reduced to increase device density, then capacity increases, but process constraints become overwhelming

Engineering Contradiction:
Improvedevice densityVSAvoidprocess constraints
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent segments the gate structure into multiple gate lines (first gate line, second gate line, third gate line) with specific configurations. This segmentation allows independent optimization of each gate segment, enabling higher device density while managing process complexity through modular design

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces dummy gates as intermediary elements between functional transistor components. These dummy gates act as mediators that facilitate the fabrication process by providing reference structures for alignment and patterning, thereby reducing process constraints while enabling increased device density

Inventive Principle:
Principle #24Intermediary (Mediator)

3Area of stationary object

If uniform layouts are implemented for SRAM and register file bit cells, then space efficiency increases, but design flexibility may be reduced

Engineering Contradiction:
Improvebit cell areaVSAvoidlayout flexibility
Core Design Contradiction:
Area of stationary objectVSAdaptability or versatility

Solution Approach 1:

The patent creates a universal layout structure that serves multiple functions: it implements both SRAM and register file bit cells using the same fundamental pattern of gate lines and active regions. This universal design achieves space efficiency through standardization while maintaining adaptability by configuring the same structure for different memory types through selective connection and doping variations

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS20250071963A1Uniform layouts for SRAM and register file bit cells
Publication Date: 2025.02.27 INTEL CORP
  • US20250071963A1 patent drawing
  • US20250071963A1 patent drawing
  • US20250071963A1 patent drawing

AI summary

Uniform layouts for SRAM and register file bit cells are described. In an example, an integrated circuit structure includes a six transistor (6T) static random access memory (SRAM) bit cell on a substrate. The 6T SRAM bit cell includes first and second active regions parallel along a first direction of the substrate. First, second, third and fourth gate lines are over the first and second active regions, the first, second, third and fourth gate lines parallel along a second direction of the substrate, the second direction perpendicular to the first direction.