Unitized Crucible Assembly for Silicon Ingot Growth

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Solution Overview

Problem

Conventional crucible assemblies for continuous Czochralski silicon ingot growth deform and lose tolerances due to connection degradation, requiring alignment tools and complex fabrication processes.

Innovation Solution

A unitized crucible assembly is formed using a crucible mold with a channel network filled with a slip slurry containing silica and a liquid carrier, which is then sintered to create a seamless, one-piece construction with central and inner weirs, eliminating seams and the need for alignment tools.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional nested crucibles with connected weirs are used, then the crucible assembly can be formed with multiple melt zones, but the connections degrade causing deformation and loss of tolerances

Engineering Contradiction:
Improveconnection stabilityVSAvoidtolerance maintenance
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent merges the crucible body and weirs into a single unitized structure formed by sintering silica sand in a mold cavity. This eliminates separate connections between crucible and weirs, preventing connection degradation and maintaining tolerances throughout the assembly during continuous Czochralski operation.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The mold cavity is segmented into multiple zones including outer sidewall cavity, central weir cavity, and inner weir cavity, which are filled with silica sand to form the unitized crucible assembly with distinct functional regions while maintaining structural integrity as one piece.

Inventive Principle:
Principle #1Segmentation

2Ease of operation

If nested crucibles with alignment tools are used, then uniform gas flow can be achieved, but the fabrication process becomes complex requiring alignment tools

Engineering Contradiction:
Improvegas flow uniformityVSAvoidfabrication complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent combines the crucible and weirs into a single pre-formed unitized assembly with integrated geometry. The mold cavity design incorporates all structural features including outer sidewall, central weir, and inner weir in one piece, eliminating the need for alignment tools and complex assembly procedures while ensuring uniform gas flow characteristics.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The crucible assembly is pre-formed in the mold cavity with all geometric features and tolerances established before use. The sintering process creates the final geometry in advance, eliminating the need for alignment tools during operation and simplifying the fabrication process.

Inventive Principle:
Principle #10Preliminary action

3Ease of manufacture

If connections are formed at the bottom of crucible assembly, then nested crucibles can be assembled, but the connections degrade causing deformation

Engineering Contradiction:
Improveassembly capabilityVSAvoidconnection strength
Core Design Contradiction:
Ease of manufactureVSStrength

Solution Approach 1:

The patent eliminates separate connections by forming the crucible body and weirs as a single unitized structure. The silica sand compacted in the mold cavity creates monolithic bonds during sintering, removing weak connection points at the bottom where degradation previously occurred.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The unitized crucible assembly resists deformation, simplifies fabrication, and maintains tolerances, enabling continuous ingot growth with reduced alignment tool usage and processing complexity, while ensuring improved thermal response and purity.

Implementation Method 1

The slip slurry is introduced into the channel network to fill the bottom channel, outer sidewall channel, central weir channel, and inner weir channel with the slip slurry

Methodology Applied
Scientific EffectCapillary action: Capillary Action

Implementation Method 2

The liquid carrier is at least partially removed from the channel network to form a green body

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 3

The green body is sintered to dry and densify the green body to form the unitized crucible assembly

Methodology Applied
Scientific EffectSintering: Sintering

Data Source

PatentUS11326271B2Methods for forming a unitized crucible assembly
Publication Date: 2022.05.10 GLOBALWAFERS CO LTD
  • US11326271B2 patent drawing
  • US11326271B2 patent drawing
  • US11326271B2 patent drawing

AI summary

Methods for forming a unitized crucible assembly for holding a melt of silicon for forming a silicon ingot are disclosed. In some embodiments, the methods involve a porous crucible mold having a channel network with a bottom channel, an outer sidewall channel that extends from the bottom channel, and a central weir channel that extends from the bottom channel. A slip slurry may be added to the channel network and the liquid carrier of the slip slurry may be drawn into the mold. The resulting green body may be sintered to form the crucible assembly.