Universal Inspection Device for Power Semiconductor Chip Layouts

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Solution Overview

Problem

The increasing variety of chip layouts for power semiconductor devices leads to a proliferation of inspection jigs, resulting in longer design times, higher development costs, storage challenges, and increased management costs, as each type of jig is needed for specific products.

Innovation Solution

An inspection device with a fixing plate, expanding and contracting portions, and contact probes, where the fixing portions can switch between a fixing and releasing state, allowing the upper end of the contact probes to be positioned at different levels, enabling the same device to be used for multiple products by selecting the appropriate contact probe based on current-voltage characteristics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple types of inspection jigs are manufactured to match different chip layouts, then inspection coverage for various products is improved, but device complexity and management burden increase

Engineering Contradiction:
Improveinspection coverageVSAvoidnumber of jig types
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The inspection device is designed with a fixed contact probe arrangement that can universally inspect multiple chip layouts. The probe positions are predetermined and fixed relative to the mounting surface, allowing the same device to inspect different chip types without reconfiguration, thereby achieving multi-functionality and reducing the number of jig types needed.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The inspection device separates the contact probe arrangement from the chip layout requirements. By fixing the probe positions independently of any specific chip layout, the device can accommodate various chip configurations through selective probe usage rather than requiring dedicated jigs for each layout type.

Inventive Principle:
Principle #1Segmentation

2Adaptability or versatility

If multiple types of inspection jigs are manufactured for different chip layouts, then product inspection capability is improved, but storage space requirements increase

Engineering Contradiction:
Improveproduct inspection capabilityVSAvoidstorage space
Core Design Contradiction:
Adaptability or versatilityVSVolume of stationary object

Solution Approach 1:

A single inspection device with fixed contact probes can inspect multiple chip layouts, eliminating the need to store multiple specialized jigs. The device achieves universality by having probe arrangements that work across different chip configurations, significantly reducing storage space requirements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If multiple types of inspection jigs are designed for different chip layouts, then inspection accuracy for specific products is improved, but design time increases

Engineering Contradiction:
Improveinspection accuracyVSAvoiddesign time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The contact probe positions are predetermined and fixed during device manufacturing, establishing a universal inspection framework in advance. This preliminary arrangement eliminates the need for repeated design and customization for each chip layout, reducing design time while maintaining inspection accuracy through pre-optimized probe positions.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The fixed contact probe arrangement provides a universal inspection solution that maintains accuracy across different chip layouts without requiring redesign. The predetermined probe positions are configured to work effectively for multiple chip types, eliminating iterative design processes.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Measurement precision

If multiple types of inspection jigs are manufactured for different chip layouts, then product-specific inspection quality is improved, but manufacturing cost increases

Engineering Contradiction:
Improveinspection qualityVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

Manufacturing a single inspection device with fixed contact probes that can inspect multiple chip layouts reduces manufacturing costs compared to producing multiple specialized jigs. The universal design allows economies of scale while maintaining inspection quality through pre-configured, precision-fixed probe arrangements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows a single inspection device to be applied to multiple products, reducing development and management costs, and simplifying storage by enabling the same device to be used across various chip layouts without the need for multiple jigs, while ensuring accurate contact with the inspection target.

Implementation Method 1

the contact probe is pulled to the fixing plate by a corresponding expanding and contracting portion out of the plurality of expanding and contracting portions under the fixing state

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

the contact probe whose upper end is fixed at the first position contacts the inspection target with elastic force

Methodology Applied
Scientific EffectElastic force: Elasticity

Data Source

PatentUS10802047B2Inspection device and inspection method
Publication Date: 2020.10.13 MITSUBISHI ELECTRIC CORP
  • US10802047B2 patent drawing
  • US10802047B2 patent drawing
  • US10802047B2 patent drawing

AI summary

An inspection device according to the invention of the present application includes a fixing plate, plural expanding and contracting portions whose one ends are fixed to the fixing plate, plural contact probes that are fixed to the other ends of the plural expanding and contracting portions respectively, and plural fixing portions which are provided to the plural contact probes respectively, wherein each fixing portion performs switching between a fixing state where an upper end of a corresponding contact probe is fixed at a first position and a releasing state where the contact probe is not fixed, the contact probe is pulled to the fixing plate by a corresponding expanding and contracting portion under the fixing state, and the upper end of the contact probe is placed at a second position closer to the fixing plate than the first position under the releasing state.