Unsaturated Fluorocarbon Ethers for Semiconductor Cleaning
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Solution Overview
Problem
The need for environmentally safe solvents for cleaning applications in semiconductor manufacturing, particularly for removing residual flux, lubricants, and particles, as chlorofluorocarbons (CFCs) harm the ozone layer and hydrofluorocarbons contribute to global warming, while existing hydrofluoroethers are saturated and have limitations.
Innovation Solution
Development of unsaturated fluorocarbon ethers with specific formulas, such as CF3(CF2)xCF=CFCF(OR)(CF2)yCF3, where R is CH3 or C2H5, and x + y = 1, 2, or 3, which are used as solvents for cleaning, degreasing, dewatering, and depositing fluorolubricants, manufactured through reactions involving perfluoroalkenes and alcohols with a strong base, optionally with phase transfer catalysts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If CFC compounds are used for cleaning applications, then cleaning effectiveness is improved, but environmental harm increases due to ozone layer depletion
Solution Approach 1:
The invention changes the chemical composition parameters by replacing chlorine-containing CFC compounds with fluorocarbon ethers that contain fluorine but no chlorine. This parameter change maintains the cleaning effectiveness while eliminating the harmful ozone-depleting properties, as the new compounds have zero ozone depletion potential.
Solution Approach 2:
The invention converts the harmful chlorine-containing compounds into beneficial fluorocarbon ethers. By replacing the harmful chlorine atoms with fluorine atoms and structuring the molecule as an ether, the compound's cleaning properties are preserved while its environmental harm is eliminated, effectively converting a harmful substance into a beneficial one.
2Object-affected harmful factors
If hydrofluorocarbons are used to replace CFCs, then environmental safety regarding ozone layer is improved, but global warming contribution increases
Solution Approach 1:
The invention changes the molecular structure parameters by using fluorocarbon ethers with specific formulas (CF3(CF2)xCF=CFCF(OR)(CF2)yCF3) instead of conventional hydrofluorocarbons. This structural parameter change results in compounds with lower global warming potential while maintaining environmental safety regarding the ozone layer.
Solution Approach 2:
The invention uses composite molecular structures combining perfluoroalkyl groups with ether linkages. This composite approach creates molecules that have both the environmental safety of fluorocarbons and reduced global warming impact, achieving a balance between ozone protection and climate change mitigation.
3Object-affected harmful factors
If saturated hydrofluoroethers are used, then environmental safety is improved, but cleaning performance and versatility are limited
Solution Approach 1:
The invention changes the saturation parameter by introducing unsaturated double bonds (CF=CF) into the fluorocarbon ether structure. This parameter change enhances the cleaning performance and versatility of the compound while maintaining environmental safety, as the unsaturation provides better solvency for various contaminants including fluxes, lubricants, and particles.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
These unsaturated fluorocarbon ethers provide effective, environmentally friendly solutions for cleaning and fluorolubricant deposition, offering non-flammability, ability to dissolve oils and surfactants, and efficient dewatering capabilities, reducing environmental impact and improving process efficiency.
Implementation Method 1
ability to dissolve oils, greases or lubricants (in particular fluorine-containing lubricants)
Implementation Method 2
ability to dissolve surfactant compounds used in methods for drying or dewatering
Data Source
AI summary
Disclosed are compositions comprising a compound having the formula CF3(CF2)xCF=CFCF(OR)(CF2)yCF3, wherein R is CH3 or C2H5 or mixtures thereof, and wherein x and y are independently 0, 1, 2 or 3, and wherein x + y = 1, 2 or 3. Also disclosed are unsaturated fluoroethers selected from the group consisting of CF3(CF2)xCF=CFCF(OR)(CF2)yCF3, CF3(CF2)xC(OR)=CFCF2(CF2)yCF3, CF3CF=CFCF(OR)(CF2)x(CF2)yCF3, CF3(CF2)xCF=C(OR)CF2(CF2)yCF3, and mixtures thereof, wherein R can be either CH3, C2H5 or mixtures thereof, and wherein x and y are independently 0, 1, 2 or 3, and wherein x + y = 0, 1, 2 or 3. Also disclosed herein are novel methods of using a composition comprising at least one of the compounds described above as novel solvents, carrier fluids, dewatering agents, degreasing solvents or defluxing solvents.