Upper Electrode Assembly for Balanced Plasma Plate Fastening
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Solution Overview
Problem
Conventional fastening structures for plasma electrode plates in semiconductor manufacturing equipment result in poor workability, reduced flatness, and unbalanced fastening forces, leading to adhesion issues.
Innovation Solution
A lift bar-based upper electrode assembly that includes a bush assembly and a lift bar with axial and rotational movement capabilities, allowing for detachable coupling of the plasma electrode plate to the electrode support plate, ensuring uniform fastening force and maintaining flatness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a conventional fastening structure combining an electrode plate, bush, and fastening member is used, then the plasma electrode plate can be fixed to the equipment, but the workability during fastening and unfastening becomes poor and the fastening force becomes unbalanced
Solution Approach 1:
The lift bar is designed to perform sequential dynamic movements: first axial movement to pull the plasma electrode plate upward, then rotational movement to engage the locking structure. This dynamic operation sequence enables easy fastening and unfastening while maintaining balanced fastening force through the controlled movement stages
Solution Approach 2:
The bush assembly serves as an intermediary component between the lift bar and the plasma electrode plate. The bush with its insertion groove receives the lift bar, mediating the force transmission from the lift bar's axial and rotational movements to the electrode plate, ensuring balanced force distribution during fastening
2Manufacturing precision
If a conventional fastening structure is used, then the plasma electrode plate can be attached to the equipment, but the flatness and adhesion of the electrode plate are reduced due to unbalanced fastening force
Solution Approach 1:
The sequential dynamic operation of the lift bar (axial movement followed by rotation) ensures that the plasma electrode plate is pulled upward uniformly before locking, maintaining flatness and adhesion while enabling easy fastening workability
Solution Approach 2:
The coupling structure provides localized quality enhancement at the fastening points through the bush assembly and lift bar interaction, ensuring uniform force distribution that maintains flatness and adhesion where needed most
Data Source
AI summary
The present disclosure relates to an upper electrode assembly. The upper electrode assembly comprises a bush assembly fastened to an insertion hole of a plasma electrode plate, and a lift bar received in a receiving space of an electrode support plate and configured to detachably couple the plasma electrode plate to the electrode support plate. The bush assembly comprises a bush configured to be coupled to the lift bar. The lift bar comprises a coupling portion configured to couple with the bush. The coupling portion comprises a bush insertion groove into which the bush is inserted, a first path configured to allow the lift bar to move in an axial direction with the bush inserted, and a second path configured to allow the lift bar to rotate with the bush positioned at an end of the first path.