Upper Electrode Lifting Mechanism for Plasma Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional plasma processing apparatuses face difficulties in finely controlling the lifting force of the upper electrode, which affects the precision and efficiency of plasma processing operations.
Innovation Solution
The plasma processing apparatus incorporates a lifting mechanism with supporting members, connecting members, and a sliding member that allows for precise control of the upper electrode's lifting force by sliding the connecting members inward within the cooling plate, enabling the upper electrode to be lifted and secured to the cooling plate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a cam lock mechanism is used to attach the upper electrode to the receiving plate, then the electrode can be mechanically secured, but it becomes difficult to finely control the lifting force of the upper electrode
Solution Approach 1:
The patent replaces the static cam lock mechanism with a dynamic spring-based lifting mechanism. The spring can be compressed to different degrees, allowing the lifting force to be adjusted and finely controlled. This dynamic element enables continuous variation of the lifting force rather than fixed positions, resolving the contradiction between reliable attachment and precise control.
Solution Approach 2:
The patent changes the physical parameter of the lifting force by using a spring mechanism where the compression distance can be precisely controlled. By varying the compression distance of the spring, the lifting force parameter can be finely adjusted to achieve the desired electrode positioning, thereby resolving the control precision issue while maintaining reliable attachment.
2Temperature
If the upper electrode is firmly attached to the cooling plate, then temperature stability is improved, but the ability to finely adjust lifting force is reduced
Solution Approach 1:
The spring-based mechanism provides dynamic adjustment capability while maintaining firm attachment. The spring can be compressed to achieve the desired contact pressure between the electrode and cooling plate, ensuring good thermal contact for temperature stability, while the adjustable compression allows fine control of the lifting force, resolving both requirements simultaneously.
Solution Approach 2:
The spring acts as an intermediary element between the upper electrode and the cooling plate. It transmits the lifting force while allowing precise control through compression adjustment, and simultaneously ensures adequate contact pressure for temperature stability. This intermediary mechanism resolves the contradiction by providing both firm attachment and adjustable control.
Data Source
AI summary
A plasma processing apparatus includes supporting members, connecting members and a sliding member. Each of the supporting members is partially disposed in a disc-shaped cooling plate and configured to support an upper electrode in a direction of gravity. Each of the connecting members is partially disposed in the cooling plate and extends in a diametrical direction of the cooling plate to be engaged with the corresponding supporting member. The sliding member is configured to slide the connecting members inward in the diametrical direction of the cooling plate, thereby pushing upward the supporting member and lifting the upper electrode to the cooling plate.