Upper Film Composition for Vertical Block Copolymer Alignment

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Solution Overview

Problem

Conventional upper films used in block copolymer lithography dissolve in hydrophilic solvents and lack solubility in hydrophobic solvents, hindering the formation of denser lithographic patterns.

Innovation Solution

An upper film-forming composition comprising a copolymer with maleimide and styrene structures and a non-aromatic hydrocarbon solvent is used to induce phase-separation of block copolymers on a substrate, ensuring vertical alignment without dissolution or swelling, and exhibiting solubility in hydrophobic solvents.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional upper films are used, then they dissolve in hydrophilic solvents, but they lack solubility in hydrophobic solvents and cause dissolution of block copolymers

Engineering Contradiction:

Improvesolubility in hydrophobic solventVSAvoiddissolution of block copolymer

Core Design Contradiction:

Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The upper film uses a copolymer comprising a unit structure derived from a maleimide structure and a unit structure derived from a styrene structure. This composite polymer structure provides both solubility in hydrophobic solvents and resistance to dissolving the block copolymer, resolving the contradiction between solvent adaptability and harmful dissolution effects.

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The invention changes the chemical structure parameters of the upper film material by selecting specific copolymer compositions with maleimide and styrene units. This parameter change enables the material to achieve appropriate solubility characteristics in hydrophobic solvents while maintaining stability against block copolymer dissolution.

Inventive Principle:

Principle #35Parameter changes

2Adaptability or versatility

If ether solvents like diisoamyl ether are used to achieve high solubility, then solubility in hydrophobic solvent improves, but block copolymers are dissolved even when hydrophobic

Engineering Contradiction:

Improvesolubility in hydrophobic solventVSAvoiddissolution of block copolymer

Core Design Contradiction:

Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

The copolymer comprising maleimide and styrene unit structures acts as a composite material that provides the necessary solubility in hydrophobic solvents without causing dissolution of the block copolymer. The specific combination of polymer units creates a material with balanced chemical properties that avoid the harmful dissolution effect while maintaining solubility.

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The upper film material is designed to be temporary and disposable, serving its purpose during the phase-separation induction process and then being removed. The copolymer composition enables this temporary functionality with appropriate solubility characteristics without causing permanent damage to the block copolymer structure.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

3Stability of the object's composition

If conventional upper films are used, then vertical alignment of block copolymer is achieved, but they do not show high solubility in hydrophobic solvents

Engineering Contradiction:

Improvevertical alignment of block copolymerVSAvoidsolubility in hydrophobic solvent

Core Design Contradiction:

Stability of the object's compositionVSAdaptability or versatility

Solution Approach 1:

The copolymer with maleimide and styrene unit structures serves as a composite material that simultaneously provides both the vertical alignment capability and the solubility in hydrophobic solvents. The specific chemical structure enables dual functionality that conventional single-polymer materials cannot achieve.

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The composition allows for the formation of phase-separated patterns with vertical alignment of block copolymers, maintaining their integrity in hydrophobic solvents, facilitating the production of denser lithographic patterns.

Implementation Method 1

induce phase-separation of a layer comprising a block copolymer on a substrate

Methodology Applied

Scientific EffectPhase separation:

Implementation Method 2

exhibits a good solubility to a hydrophobic solvent

Methodology Applied

Scientific EffectSolubility: Solvation

Data Source

PatentUS12578644B2Upper film-forming composition and method for producing phase-separated pattern

Publication Date: 2026.03.17 NISSAN CHEM CORP

AI summary

An upper layer film-forming composition exhibits good solubility in hydrophobic solvents and can bring about vertical alignment of a block copolymer without dissolution, swelling or the like of a layer containing the block copolymer formed on a substrate. This upper layer film-forming composition is used for phase separation of a layer containing a block copolymer formed on a substrate, and contains: (A) a copolymer containing a unit structure derived from a maleimide structure (a) and a unit structure derived from a styrene structure; and (B) as a solvent, a non-aromatic hydrocarbon compound that is a liquid at normal temperature and pressure.