Upper-Layer Film for Block Copolymer Vertical Orientation

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Solution Overview

Problem

Conventional upper-layer films formed on block copolymer layers are not soluble in hydrophobic solvents and fail to induce vertical orientation of block copolymers without dissolving or swelling the layer.

Innovation Solution

A composition comprising a copolymer with unit structures derived from maleimide and styrene, along with an ether compound as a solvent, is used to form an upper-layer film that is soluble in hydrophobic solvents and induces vertical orientation of block copolymers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a conventional upper-layer film is used, then the film can be quickly dissolved in hydrophilic solvents, but the film does not exhibit high solubility in hydrophobic solvents and fails to induce vertical orientation of block copolymers

Engineering Contradiction:

Improvesolubility in hydrophobic solventVSAvoidcapability to induce vertical orientation

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The patent changes the chemical composition parameters of the upper-layer film by incorporating a copolymer with specific hydrophobic-hydrophilic block ratios (70:30 to 30:70). This parameter adjustment enables the film to achieve both high solubility in hydrophobic solvents like diisoamyl ether and the capability to induce vertical orientation of block copolymers during phase separation

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite upper-layer film material combining a copolymer (comprising hydrophobic and hydrophilic blocks) with a hydrophobic solvent (ether compound with 8-16 carbon atoms). This composite structure provides both the desired solubility characteristics and the functional capability to induce vertical orientation without dissolving the block copolymer layer

Inventive Principle:

Principle #40Composite materials

2Reliability

If an upper-layer film is formed to induce vertical orientation, then the block copolymer can be oriented, but the film may dissolve or swell the block copolymer layer

Engineering Contradiction:

Improvevertical orientation capabilityVSAvoidintegrity of block copolymer layer

Core Design Contradiction:

ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent uses a copolymer-based upper-layer film as an intermediary substance that mediates between the hydrophobic solvent and the block copolymer layer. The film's dual-nature composition (hydrophobic and hydrophilic blocks) allows it to interact with hydrophobic solvents while maintaining stability against the block copolymer layer, preventing dissolution or swelling during the orientation process

Inventive Principle:

Principle #24Intermediary (Mediator)

3Ease of manufacture

If a copolymer with maleimide and styrene structures is used, then the film achieves good solubility in hydrophobic solvents, but the composition complexity increases

Engineering Contradiction:

Improvesolubility in hydrophobic solventVSAvoidcopolymer structure complexity

Core Design Contradiction:

Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent manages composition complexity by controlling specific parameters of the copolymer: the ratio of hydrophobic to hydrophilic blocks (70:30 to 30:70) and the molecular weight (5,000 to 500,000). These parameter specifications balance the need for hydrophobic solvent solubility with manageable structural complexity, enabling practical manufacturing

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the formation of an upper-layer film that is soluble in hydrophobic solvents, preventing dissolution or swelling of the block copolymer layer and allowing for effective vertical orientation, thereby improving the phase-separation process.

Implementation Method 1

causing phase separation in the block copolymer layer formed on the substrate

Methodology Applied

Scientific EffectPhase separation:

Data Source

PatentUS10865262B2Upper-layer film forming composition and method for producing a phase-separated pattern

Publication Date: 2020.12.15 NISSAN CHEM CORP

AI summary

An overlay film-forming composition used to cause phase separation to a block copolymer-containing layer formed on a substrate, the composition including: (A) a copolymer that includes (a) a unit structure derived from maleimide structure and a unit structure derived from styrene structure; and (B) an ether compound having 8-16 carbon atoms as a solvent. The overlay film-forming composition exhibits good solubility with respect to a hydrophobic solvent, and is able to induce vertical alignment of a block copolymer without causing dissolution, swelling, and the like of the block copolymer-containing layer formed on the substrate.