Upper Platen Cooling Channels Without Brazing
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Solution Overview
Problem
The manufacturing of upper platens for chemical mechanical polishing (CMP) is costly and time-consuming due to the use of brazing processes to seal cooling channels.
Innovation Solution
The use of additive manufacturing techniques to create cooling channels within the main body of the upper platen, either fully or partially, eliminating the need for brazing and reducing manufacturing time and cost.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional brazing process is used to manufacture upper platen with cooling channels, then manufacturing precision and structural integrity are maintained, but manufacturing time and cost increase significantly
Solution Approach 1:
The patent changes the manufacturing process parameters from traditional subtractive machining and brazing to additive manufacturing. This parameter change enables direct formation of cooling channels within the platen structure, eliminating the need for separate brazing operations while maintaining dimensional accuracy and structural integrity.
Solution Approach 2:
The patent merges the cooling channel formation and platen manufacturing into a single additive manufacturing process. The cooling channels are integrated directly into the platen body during fabrication, combining what were previously separate manufacturing steps (machining channels, applying brazing material, heating, and assembling) into one unified process.
2Strength
If traditional brazing process is used to attach cover to main body, then strong bonding is achieved, but manufacturing cost and time increase
Solution Approach 1:
The patent merges the cover attachment with the main body fabrication into a single additive manufacturing process. The cover and main body are printed as an integrated structure, eliminating the need for separate brazing operations. This integration maintains structural strength while dramatically reducing manufacturing cycle time and eliminating brazing material costs.
Solution Approach 2:
The patent extracts the brazing process entirely from the manufacturing workflow. By using additive manufacturing to directly create the integrated platen structure with cooling channels and cover, the hazardous and time-consuming brazing step is completely removed from the process, while the structural integrity is maintained through the additive manufacturing process itself.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Additive manufacturing allows for cost-effective and time-efficient production of upper platens with controlled cooling channels, enhancing heat transfer performance and reducing the need for expensive brazing processes.
Implementation Method 1
filling the at least one cooling channel with a liquidizing agent, wherein the liquidizing agent reacts with the filler material to produce an effluent fluid
Data Source
AI summary
Embodiments of the disclosure provided herein include an apparatus and method for additive manufacturing a component for a semiconductor processing apparatus. The apparatus for additive manufacturing includes a printhead configured to selectively deposit layers on build the component, wherein the printhead may selectively deposit a first set of layers onto the build platform, and selectively deposit a second set of layers on the first set of layers, each of the second set of layers comprising a gap that forms a cooling channel through the component. The cooling channel is filled a filler material. A third set of layers covers the cooling channel before the channel is exposed to a liquidizing agent, wherein the liquidizing agent reacts with the filler material to produce an effluent fluid which is then drained. In other embodiments, the cooling channel may be machined into the component before being filled with the filler material.