Upper Susceptor Ring Nested Structure for Thermocouple Protection
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Solution Overview
Problem
Traditional susceptor ring assemblies in semiconductor processing suffer from temperature fluctuations and high temperatures, leading to gaps that allow process gases to contact thermocouples, causing deterioration and reducing their accuracy and lifespan.
Innovation Solution
A two-piece susceptor ring assembly with a fully enclosed thermocouple at one end and partially enclosed at the other, forming a double-walled structure when assembled with a lower susceptor ring, which includes an L-shaped structure to prevent gas ingress and protect the thermocouples.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional susceptor ring assemblies are used with open thermocouple structures, then the device complexity is reduced, but the thermocouples are exposed to process gases causing deterioration and reduced measurement accuracy
Solution Approach 1:
The patent implements a nested structure where an inner susceptor ring is placed inside an outer susceptor ring, creating a double-walled configuration. The thermocouple is positioned within the inner ring, which is nested within the outer ring structure. This nesting provides enclosed protection for the thermocouple while maintaining a manageable device complexity through modular assembly.
Solution Approach 2:
The patent introduces an intermediary barrier structure (the inner susceptor ring with enclosed walls) that mediates between the thermocouple and the process gases. This intermediary enclosure protects the thermocouple from direct gas exposure while allowing the thermocouple to continue its measurement function without modification.
2Temperature
If susceptor rings are exposed to high temperatures and temperature fluctuations, then the processing function is maintained, but gaps form in the susceptor ring allowing gas ingress to thermocouples
Solution Approach 1:
The nested double-rink structure creates multiple thermal barriers and structural redundancies. When temperature fluctuations cause expansion or contraction, the inner ring is protected by the outer ring, preventing gap formation that would expose the thermocouple to gases. The nested configuration provides structural stability under thermal stress.
Solution Approach 2:
The patent designs the susceptor ring assembly with pre-engineered compensation features that anticipate thermal expansion and contraction. The double-walled structure with controlled clearances accommodates thermal movements before gaps can form that would compromise thermocouple protection, cushioning against the harmful effects of temperature fluctuations.
3Duration of action of stationary object
If process gases contact thermocouples in traditional assemblies, then the structure remains simple, but thermocouple deterioration occurs reducing lifespan and accuracy
Solution Approach 1:
The nested inner and outer susceptor rings create an enclosed environment for the thermocouple, extending its lifespan by preventing gas contact. The modular nested design allows this protection to be achieved without excessively increasing overall device complexity, as each ring can be manufactured and assembled separately.
Solution Approach 2:
The inner susceptor ring acts as an intermediary protective barrier between the process gases and the thermocouple. This intermediary structure extends thermocouple lifespan by eliminating direct gas contact, while the design maintains reasonable complexity through the use of standard susceptor ring components arranged in a protective configuration.
Data Source
AI summary
In an embodiment, a susceptor ring assembly for use in a semiconductor processing tool includes: an upper ring plate having an aperture formed therethrough, the upper ring plate including: a first upper ring wall extending from the upper ring plate along the aperture; a second upper ring wall extending from the upper ring plate and concentric with the first upper ring wall; a bridge extending between the first upper ring wall and the second upper ring wall; a lower ring configured to interlock with the upper ring plate, the lower ring including: a lower ring wall concentric with the first upper ring wall, wherein the lower ring wall is configured to abut the first upper ring wall; and a lower plate parallel with the bridge and extending from the lower ring wall.