UV Light Cleaning Device With Spectral Modulation Layer
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Solution Overview
Problem
Conventional UV light cleaning technologies often damage substrates due to high-energy UV light irradiation, particularly causing issues in copper processes that lead to display problems.
Innovation Solution
A UV light cleaning device with an energy conversion component, including a spectral modulation layer that reduces UV light energy, featuring a conversion region and a transmission region with transparent material doped with rare earth complexes, and a driver assembly to move the spectral modulation layer for precise energy adjustment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high-energy UV light is used for cleaning substrates, then cleaning effectiveness is improved, but substrate damage occurs
Solution Approach 1:
A spectral modulation layer is introduced as an intermediary component between the UV light source and the substrate. This layer selectively modulates the UV light spectrum, allowing effective cleaning wavelengths to pass through while blocking or attenuating wavelengths that cause substrate damage, particularly in the copper process range.
Solution Approach 2:
The patent changes the spectral parameters of the UV light by using the spectral modulation layer to adjust the energy distribution across different wavelengths. This enables the cleaning process to operate at optimal effectiveness while maintaining the energy at damaging wavelengths below the substrate damage threshold.
2Object-affected harmful factors
If spectral modulation layer is added to convert UV light energy, then substrate damage is prevented, but device complexity increases
Solution Approach 1:
The spectral modulation layer is implemented as a thin film structure that can be integrated into the existing UV cleaning device. This thin film approach minimizes the added complexity while achieving the desired spectral modulation effect, as thin films are easier to manufacture and integrate compared to bulk optical components.
Solution Approach 2:
The spectral modulation layer utilizes composite material structures with specific optical properties to achieve wavelength-selective modulation. By using composite materials designed for specific spectral characteristics, the device achieves effective substrate protection without requiring multiple separate components, thus limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively converts high-energy UV light to specific energy levels that prevent substrate damage during cleaning, ensuring effective surface cleaning without causing harm to the substrates.
Implementation Method 1
an energy conversion component disposed between the UV light source and the supporting platform for converting energy of the UV light to specific energy
Implementation Method 2
the ligand is configured to absorb the energy of the UV light and to transfer the energy of the UV light to the rare earth material, and the rare earth material is configured to absorb the light emitting from the ligand and to emit non-UV light
Data Source
AI summary
Disclosed is an ultraviolet (UV) light cleaning device. By providing an energy conversion component between an UV light source and a supporting platform, the UV light cleaning device can convert the energy of the UV light to specific energy by the energy conversion component. When the energy of the UV light is higher, the energy of the UV light is converted to specific energy lower than the energy of the UV light, thereby avoiding damage to the substrate while cleaning the substrate to solve the technical problem that the conventional UV light cleaning damages the substrate in a cleaning process.