UV Optical Coating Nanolayers for Low-Absorption Reflection

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Solution Overview

Problem

Optical elements for the UV wavelength range, particularly in the shorter-wave range, face challenges in achieving high reflection or transmission while maintaining a long lifetime, as existing dielectric layer systems are prone to degradation due to energy absorption.

Innovation Solution

Incorporating a nanolayer system at the position of higher refractive index layers, constructed from materials with comparable refractive indices, to reduce absorption and enhance reflection or transmission, thereby reducing energy deposition and degradation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a dielectric layer system is used to improve reflection or transmission in the UV wavelength range, then the optical performance is improved, but the lifetime is reduced due to energy absorption and degradation

Engineering Contradiction:
ImprovelifetimeVSAvoidenergy absorption
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent applies segmentation by replacing portions of the dielectric layer system with nanolayer systems. The nanolayer system consists of multiple ultrathin layers (each layer thickness between 1 nm and 10 nm) arranged in sequence, which segment the optical path and reduce energy absorption per layer while maintaining high reflection or transmission performance in the UV wavelength range.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs composite materials by combining nanolayer systems with dielectric layer systems. The nanolayer system is integrated into the dielectric layer system at specific positions, creating a composite structure that leverages the advantages of both: the nanolayer system reduces energy absorption and extends lifetime, while the dielectric layer system provides the necessary optical performance for UV applications.

Inventive Principle:
Principle #40Composite materials

2Reliability

If the dielectric layer system is modified with nanolayer systems, then the reflection or transmission is increased, but the structural complexity is increased

Engineering Contradiction:
Improvereflection or transmissionVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies local quality by introducing nanolayer systems at specific positions within the dielectric layer system rather than uniformly throughout. The nanolayer system is placed at positions where it most effectively reduces energy absorption and enhances optical performance, while maintaining the overall simplicity of the dielectric layer system structure.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The nanolayer system increases reflection or transmission by more than 1% and extends the lifetime of optical elements, particularly in the UV wavelength range, by minimizing energy absorption and reducing the risk of layer degradation.

Implementation Method 1

By virtue of less radiation being absorbed in the respective dielectric layer system, less energy is deposited in the optical system, energy which might otherwise result in degradation of the dielectric system

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 2

In contrast to the known dielectric layer systems in which the transmission or reflection is increased by means of interference for optical layer thicknesses of substantially the quarter of the incident wavelength

Methodology Applied
Scientific EffectInterference: Interference

Implementation Method 3

nanolayer systems are structures which are constructed from a plurality of layers having thicknesses in the nanometer range and with the aid of which the refractive index and the absorption of the respective nanolayer system can be directly influenced

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS20260079411A1Optical element for the ultraviolet wavelength range
Publication Date: 2026.03.19 CARL ZEISS SMT GMBH
  • US20260079411A1 patent drawing
  • US20260079411A1 patent drawing
  • US20260079411A1 patent drawing

AI summary

In order to increase transmission or reflection, an optical element for the ultraviolet (UV) wavelength range is proposed, comprising a substrate and an optical coating configured as a dielectric layer system, the dielectric layer system comprising layers of at least two different base materials with different refractive indices at a wavelength in the UV wavelength range, which are arranged alternately, wherein the optical element comprises a nanolayer system at the position of at least one layer of the base material with the higher refractive index.