Segmented UV Emitter Array for Large-Area Uniform Irradiance

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing UV curing systems for large-area substrates, such as semiconductor processing and flat panel display fabrication, face inefficiencies due to non-uniform irradiance patterns, which are often corrected with complex optical designs that reduce efficiency.

Innovation Solution

An array of small UV light-emitting devices arranged within a housing with flexible positioning and external reflectors to produce a uniform irradiance pattern, achieving high optical efficiency and customizable spectral content.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If a single large UV emitting lamp is used to irradiate large-area substrates, then the coverage area is sufficient, but the irradiance pattern becomes non-uniform

Engineering Contradiction:
Improveirradiated areaVSAvoidirradiance uniformity
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent divides a single large UV lamp into multiple smaller UV emitting lamps arranged in an array. Each small lamp acts as an independent emitter, and their combined output creates a uniform irradiance pattern across the large substrate area. This segmentation resolves the contradiction by maintaining large coverage while achieving uniformity through distributed emission sources.

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If complicated optical designs are added to correct non-uniform irradiance, then the irradiance uniformity improves, but the system efficiency decreases

Engineering Contradiction:
Improveirradiance uniformityVSAvoidoptical system efficiency
Core Design Contradiction:
Manufacturing precisionVSLoss of energy

Solution Approach 1:

Instead of using complex optical components to redistribute light from a single source, the patent segments the light source itself into multiple small lamps. This eliminates the need for additional optical elements that would cause energy losses, achieving uniformity through the inherent distributed nature of the segmented sources.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent extracts and removes the complicated optical correction components from the system. By segmenting the light source, the system no longer requires additional optical elements for irradiance uniformity correction, thereby eliminating the energy losses associated with those components.

Inventive Principle:
Principle #2Taking out (Extraction)

3Manufacturing precision

If multiple small UV emitters are used to provide uniform irradiance, then the irradiance uniformity improves, but the device complexity increases

Engineering Contradiction:
Improveirradiance uniformityVSAvoidemitter array complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent combines multiple small UV emitters into a single integrated array structure that functions as one unified light source. This merging approach maintains irradiance uniformity while reducing operational complexity by treating the array as a single entity rather than multiple independent systems.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The array of small UV emitters is designed to serve multiple functions simultaneously: providing large area coverage, achieving uniform irradiance distribution, and maintaining system efficiency. This multi-functionality reduces the need for additional specialized components, thereby managing device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides a highly uniform and efficient UV irradiance over a large area with less than 5% uniformity fluctuations and greater than 90% optical efficiency, improving upon existing systems that operate at 50% efficiency with higher uniformity fluctuations.

Implementation Method 1

The plurality of filament-less bulbs is configured to emit light from the first open end

Methodology Applied
Scientific EffectPlasma: Plasma

Implementation Method 2

emit light from the first open end to produce a substantially uniform area of illumination

Methodology Applied
Scientific EffectElectromagnetic radiation: Electromagnetic Induction

Implementation Method 3

a first reflector extending from the one or more side walls proximal to the open end of the first housing; and a second reflector extending from the first reflector

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentEP3044633B1Large area high-uniformity UV source with many small emitters
Publication Date: 2020.11.04 HERAEUS NOBLELIGHT AMERICA LLC
  • EP3044633B1 patent drawingFigure 1
  • EP3044633B1 patent drawingFigure 2A~2B
  • EP3044633B1 patent drawingFigure 3

AI summary

A light-emitting source for curing applications is disclosed. The light-emitting source comprises a first housing having a top wall and one or more side walls. The top wall and the one or more side walls define a first enclosure having a first open end. The light-emitting source further comprises a plurality of light-emitting devices arranged within the first enclosure of the first housing. One side of each of the plurality of light-emitting devices faces outward from the first open end of the first enclosure. The plurality of light-emitting devices is configured to emit light from the first open end to produce a substantially uniform area of illumination on a facing portion of a surface of a target.