UV Light Emitting Element Barrier Structure for Higher Output
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Solution Overview
Problem
Existing ultraviolet light emitting elements with multiple quantum well structures face challenges in increasing output due to lattice relaxation and reduced electron-hole recombination probability caused by large lattice constant differences and surface roughness between well and barrier layers.
Innovation Solution
Incorporating a first barrier layer containing Al and Ga with a larger band gap energy, followed by a second barrier layer containing Al, Ga, and In with a smaller band gap energy, to reduce lattice constant difference and improve electron confinement in well layers, thereby enhancing electron-hole recombination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a multiple quantum well structure is used for ultraviolet light emission, then light emission capability is achieved, but output is insufficient due to lattice relaxation and reduced electron-hole recombination probability
Solution Approach 1:
The patent applies parameter changes by systematically varying the composition ratios of Al, Ga, and In in the barrier and well layers. Specifically, the barrier layers have different Al and Ga compositions to create appropriate band gap differences, while the well layers have optimized Ga and In ratios to enhance electron-hole recombination probability. This compositional parameter optimization resolves the contradiction by maintaining reliable recombination while achieving high output emission.
Solution Approach 2:
The patent employs composite materials by creating a multiple quantum well structure with alternating barrier layers and well layers made of different nitride semiconductor compositions. The barrier layers contain AlGaN and AlInGaN compounds with different band gaps, while the well layers contain InGaN compounds. This composite structure enables both sufficient electron-hole recombination in the well layers and effective carrier confinement through the barrier layers, thereby achieving high output emission.
2Power
If barrier layers with large lattice constant difference are used to confine carriers, then carrier confinement is improved, but lattice relaxation and surface roughness increase reducing recombination efficiency
Solution Approach 1:
The patent applies local quality by creating spatial variation in material composition within the quantum well structure. The barrier layers have locally optimized Al and Ga compositions to provide strong carrier confinement, while the well layers have locally optimized Ga and In compositions to minimize lattice mismatch and maintain smooth surfaces. This local compositional optimization allows simultaneous achievement of strong confinement and low surface roughness.
Solution Approach 2:
The patent uses parameter changes by systematically adjusting the Al, Ga, and In composition ratios in different layers. The barrier layers have higher Al content for larger band gap and stronger confinement, while the well layers have optimized Ga and In ratios to reduce lattice constant differences with adjacent barrier layers. This parameter optimization reduces lattice relaxation and surface roughness while maintaining effective carrier confinement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed structure results in a high output ultraviolet light emitting element with improved emission output, output retention, and reduced lattice relaxation, as demonstrated by increased electron-hole recombination probability and better crystallinity of well layers.
Implementation Method 1
a first barrier layer containing Al and Ga, and a second barrier layer disposed in contact with the first barrier layer, containing Al, Ga, and In, and having a smaller band gap energy than the first barrier layer
Implementation Method 2
having a smaller band gap energy than the first barrier layer. At least one of the plurality of well layers is disposed in contact with the second barrier layer and has a smaller band gap energy than the second barrier layer
Implementation Method 3
an active layer emitted ultraviolet light disposed on the n-side nitride semiconductor layer and composed of a plurality of nitride semiconductor well layers and a plurality of nitride semiconductor barrier layers
Data Source
AI summary
A method of manufacturing a light emitting element includes: an n-side nitride semiconductor layer growing process in which an n-side nitride semiconductor layer is grown; an active layer growing process in which an active layer comprising a plurality of nitride semiconductor well layers and a plurality of nitride semiconductor barrier layers is grown on the n-side nitride semiconductor layer, wherein the active layer is configured to emit ultraviolet light; and a p-side nitride semiconductor layer growing process in which a p-side nitride semiconductor layer is grown on the active layer. The active layer growing process includes: a first barrier layer growing process, a second barrier layer growing process, and a well layer growing process.


