UV Exposure Apparatus with Real-Time Intensity Feedback

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Solution Overview

Problem

Existing exposure apparatuses for forming photo-alignment layers in liquid crystal display devices face issues with non-uniform ultraviolet ray exposure, leading to inconsistent photo-alignment layer formation.

Innovation Solution

An exposure apparatus equipped with a substrate transporting unit and sensors to measure ultraviolet ray intensity and adjust the moving speed of substrates accordingly, ensuring uniform exposure by continuously recalculating and adjusting the exposure parameters based on real-time measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the exposure apparatus uses a fixed moving speed for substrates, then the device complexity is reduced, but the manufacturing precision deteriorates due to non-uniform ultraviolet ray exposure

Engineering Contradiction:

Improveuniformity of photo-alignment layer formationVSAvoidcomplexity of exposure control system

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The exposure apparatus incorporates sensors that detect the intensity of ultraviolet rays in real-time and feed this information back to the control unit. The control unit then adjusts the moving speed of substrates based on the detected intensity variations, ensuring uniform exposure across all substrates despite fluctuations in UV ray output.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The system transitions from a static, fixed moving speed approach to a dynamic speed control mechanism. The moving speed of substrates is continuously adjusted based on real-time measurements of ultraviolet ray intensity, allowing the system to adapt to changing exposure conditions and maintain consistent photo-alignment layer formation.

Inventive Principle:

Principle #15Dynamics

2Reliability

If the exposure apparatus operates without real-time measurement, then the device complexity is reduced, but the reliability deteriorates as ultraviolet ray intensity decreases over time

Engineering Contradiction:

Improveconsistency of photo-alignment layer formationVSAvoidcomplexity of measurement and control system

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

Sensors are installed to continuously monitor the intensity of ultraviolet rays during the exposure process. This feedback information is transmitted to the control unit, which adjusts the substrate moving speed to compensate for intensity variations, ensuring reliable and consistent photo-alignment layer formation over time.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The system replaces purely mechanical fixed-speed transport with a control system that uses sensors and electronic regulation. This substitution allows for dynamic adjustment of the substrate moving speed based on real-time ultraviolet ray intensity measurements, improving reliability without requiring complex mechanical modifications.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If the exposure apparatus adjusts moving speed continuously, then the manufacturing precision is improved, but the productivity decreases due to repeated measurement and calculation cycles

Engineering Contradiction:

Improveuniformity of exposure across substratesVSAvoidexposure throughput

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The system performs preliminary measurements of ultraviolet ray intensity before the exposure process begins and calculates the appropriate moving speed in advance. This preliminary action allows the control unit to set the optimal speed before substrates enter the exposure area, minimizing interruptions and maintaining high productivity while ensuring precise uniform exposure.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

Instead of continuous adjustment during exposure, the system performs periodic measurements and speed calculations at predetermined intervals or before each batch of substrates. This periodic action reduces the frequency of adjustments, maintaining manufacturing precision while minimizing the impact on exposure throughput and overall productivity.

Inventive Principle:

Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution ensures uniform exposure of substrates even as ultraviolet ray intensity decreases over time, maintaining consistent photo-alignment layer formation across multiple substrates.

Implementation Method 1

a sensor IS to measure characteristics of the ultraviolet rays generated by the exposure part 190

Methodology Applied

Scientific EffectUltraviolet radiation detection: Absorption (EM radiation)

Implementation Method 2

An alignment layer may be formed by a photo-alignment process using an exposure apparatus

Methodology Applied

Scientific EffectPhotopolymerization: Photopolymerisation

Data Source

PatentUS9791783B2Exposure apparatus and exposure method using the same

Publication Date: 2017.10.17 SAMSUNG DISPLAY CO LTD

AI summary

An exposure apparatus including a substrate transporting unit configured to transport a substrate in a first direction, and including a first measuring part; and an exposure part disposed over the substrate transporting unit configured to irradiate the substrate with ultraviolet rays. The first measuring part is configured to measure an intensity of the ultraviolet rays before the substrate is irradiated.