UV Inspection Barrier for Impurity Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The increasing demand for inspecting ever-shrinking integrated circuits poses challenges due to impurities generated during the inspection process, which can harm the inspection tool and the sample, leading to erroneous results.
Innovation Solution
A sample inspection tool equipped with a light source producing effective inspection radiation below 200 nm, a sample holder, and an imaging subsystem, along with a barrier positioned between the last optical component and the sample to inhibit impurities while allowing radiation to pass through.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a light source producing radiation below 200 nm is used for inspection, then inspection precision is improved, but impurities are generated that can harm the inspection tool and sample
Solution Approach 1:
A barrier positioned in the optical path between the light source and the sample serves as an intermediary element. This barrier selectively transmits the inspection radiation below 200 nm while blocking impurities generated during inspection, thereby protecting both the sample and optical components without compromising inspection precision
2Reliability
If a barrier is positioned in the optical path to inhibit impurities, then reliability is improved, but the barrier may absorb or scatter inspection radiation
Solution Approach 1:
The barrier is implemented as a thin film structure that is sufficiently thin to minimize absorption and scattering of inspection radiation while still being thick enough to effectively block impurities. This thin film design optimizes the balance between protection and radiation transmission
Solution Approach 2:
The barrier employs composite material construction with multiple layers having different properties. This composite structure is engineered to selectively block impurities while maintaining high transmission of inspection radiation, achieving both reliability and energy efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces impurities in the inspection tool and on the sample, ensuring accurate inspection results and protecting the tool and sample from contamination.
Implementation Method 1
the barrier permitting the radiation to pass therethrough while inhibiting impurities from reaching the sample
Implementation Method 2
a barrier positioned between the last sub-system component in the optical path and the sample to be held by the sample holder, the barrier permitting the radiation to pass therethrough while inhibiting impurities
Data Source
AI summary
A sample inspection tool is described. The inspection tool includes a light source configured to produce effective inspection radiation below 200 nm, a sample holder, an imaging sub-system containing sub-system components that delivers light along an optical path from the light source to a sample to be held by the sample holder, and a barrier positioned between the last sub-system component in the optical path and the sample to be held by the sample holder. The barrier permits the radiation to pass therethrough while inhibiting impurities from reaching the sample to be held by the sample holder. In another embodiment, a barrier is provided for use in an inspection tool.