UV Irradiation Module Illuminance Detection and Control
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Solution Overview
Problem
The existing substrate treatment systems face inefficiencies due to the limited operating life of ultraviolet irradiation modules, leading to increased maintenance frequency, reduced throughput, and higher costs, as the light sources are changed prematurely to account for variations in their lifespan, resulting in unnecessary downtime and extended processing times.
Innovation Solution
A substrate treatment apparatus and method that includes an illuminance detection system to adjust the irradiation time and redirect substrates to alternative modules when the illuminance of a UV module falls below a set value, allowing the module to operate until closer to its end-of-life, thereby extending its usage and reducing maintenance needs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the lamp is changed at the time earlier than the actual end of operating life to account for variations in lifespan, then the reliability of the treatment is improved, but the maintenance frequency increases and the running cost becomes high
Solution Approach 1:
The system dynamically changes the exposure time parameter based on the detected illuminance of the lamp. As the lamp's illuminance decreases over its operating life, the control unit automatically increases the exposure time to compensate, allowing the lamp to be used until its actual end of life rather than requiring premature replacement. This resolves the contradiction by maintaining treatment reliability through parameter adjustment while extending lamp usage and reducing maintenance frequency.
2Reliability
If the exposure time is increased according to the amount of decrease in illuminance (integrated exposure), then the treatment effectiveness is maintained, but the processing time becomes long and the throughput decreases when the lamp reaches the end of operating life
Solution Approach 1:
The system implements dynamic control of the exposure time based on real-time illuminance detection. The control unit continuously monitors the lamp's illuminance and adjusts the exposure time accordingly, creating a dynamic balance between maintaining treatment effectiveness and minimizing processing time. This dynamic approach allows the system to adapt to the lamp's aging process without sacrificing throughput, resolving the contradiction between treatment effectiveness and processing time.
3Measurement precision
If the illuminance detection value becomes a set value or less, then the system can identify when the light source needs replacement, but the substrates already in the module must wait for completion of current processing
Solution Approach 1:
The system performs preliminary actions by detecting illuminance levels and preparing for lamp replacement before the lamp actually fails. When the illuminance detection value reaches the set threshold, the system has already identified the need for replacement and can plan the transition. The substrates already in the module complete their current processing cycle, and the lamp is replaced proactively rather than reactively, minimizing disruption to the overall workflow while maintaining precise monitoring of the light source condition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach extends the operational life of UV modules, decreases maintenance frequency, and maintains throughput by adjusting irradiation times for substrates already processed in the affected module, thus reducing costs and minimizing processing delays.
Implementation Method 1
an ultraviolet irradiation module for irradiating a substrate with an ultraviolet ray
Implementation Method 2
an illuminance detection part that detects an illuminance of a light source of the ultraviolet irradiation module
Data Source
AI summary
A substrate treatment apparatus configured such that substrates in a same lot are distributed by a delivery mechanism into a plurality of unit blocks, each unit block including a solution treatment module, an ultraviolet irradiation module, and a substrate carrying mechanism, the apparatus includes: an illuminance detection part that detects an illuminance of a light source of the ultraviolet irradiation module; and a control part that controls, when an illuminance detection value of the ultraviolet irradiation module in one unit block among the plurality of unit blocks becomes a set value or less, the delivery mechanism to stop delivery of a substrate to the one unit block and deliver subsequent substrates to another unit block, and the ultraviolet irradiation module to perform irradiation on substrates which have already been delivered to the one unit block with an irradiation time adjusted to a length according to the illuminance detection value.