Ultraviolet Laser Device Multi-Stage Fiber Amplifier Output Power

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Solution Overview

Problem

Existing ultraviolet laser devices face limitations in increasing the output of ultraviolet laser beams beyond a certain threshold, and achieving high wavelength conversion efficiency without optical elements for beam profile shaping in the ultraviolet region is challenging.

Innovation Solution

The ultraviolet laser device employs a multi-stage fiber amplifier system comprising ytterbium and thulium doped fiber amplifiers, along with wavelength conversion elements like LBO and CLBO crystals, to generate high-power infrared laser beams that are subsequently converted to ultraviolet wavelengths through sum frequency generation, enhancing output without requiring optical elements for beam shaping in the ultraviolet region.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If EDFAs are connected in multi-stage series to increase the output of the infrared laser beam, then the output power increases, but the maximum output is limited to around several tens of watts and cannot be increased further

Engineering Contradiction:
Improveoutput power of infrared laser beamVSAvoidoutput power of ultraviolet laser device
Core Design Contradiction:
PowerVSProductivity

Solution Approach 1:

The patent divides the laser beam generation into three separate fiber amplifiers (first, second, and third) that output infrared laser beams at different wavelengths. Each amplifier operates independently to generate a specific wavelength component, which are then combined and converted to ultraviolet. This segmentation allows each amplifier to be optimized for its specific wavelength range, overcoming the output limitation of single-stage EDFAs.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent uses a composite approach by combining outputs from three different fiber amplifier types (ytterbium-doped, thulium-doped, and either ytterbium or erbium doped) to create a composite infrared laser beam that contains multiple wavelength components. This composite beam is then converted to ultraviolet through nonlinear optical processes, achieving higher output than any single amplifier could produce.

Inventive Principle:
Principle #40Composite materials

2Loss of energy

If optical elements for beam profile shaping are provided in the ultraviolet wavelength region to improve wavelength conversion efficiency, then conversion efficiency increases, but device complexity and the need for additional optical elements increase

Engineering Contradiction:
Improvewavelength conversion efficiencyVSAvoidoptical elements in ultraviolet region
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent performs beam profile shaping and optimization in the infrared region before the wavelength conversion to ultraviolet. By preparing the beam characteristics (profile, quality, and spatial distribution) in the infrared domain using standard optical elements, the system achieves high wavelength conversion efficiency without requiring additional beam-shaping optical elements in the ultraviolet region, thus reducing device complexity.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly increases the output of ultraviolet laser beams, achieving high efficiency and beam quality while eliminating the need for optical elements in the ultraviolet region, thus overcoming previous output limitations.

Implementation Method 1

a first fiber amplifier, a second fiber amplifier, and a third fiber amplifier that respectively output a first infrared laser beam, a second infrared laser beam, and a third infrared laser beam at infrared wavelengths; the first fiber amplifier is an ytterbium doped fiber amplifier; the second fiber amplifier is a thulium doped fiber amplifier; the third fiber amplifier is an ytterbium doped fiber amplifier or an erbium doped fiber amplifier

Methodology Applied
Scientific EffectStimulated emission:

Implementation Method 2

the first optical system wavelength converts the first infrared laser beam to a predetermined harmonic wave, and generates the predetermined harmonic wave as the first laser beam

Methodology Applied
Scientific EffectHarmonic generation: Second Harmonic Generation

Implementation Method 3

the first wavelength conversion element generates an earlier stage ultraviolet laser beam in the ultraviolet region by sum frequency generation between the predetermined harmonic wave and the second laser beam; and the second wavelength conversion element generates an ultraviolet laser beam by sum frequency generation between the earlier stage ultraviolet laser beam and the third laser beam

Methodology Applied
Scientific EffectSum frequency generation:

Data Source

PatentUS8780946B2Ultraviolet laser device
Publication Date: 2014.07.15 NIKON CORP
  • US8780946B2 patent drawing
  • US8780946B2 patent drawing
  • US8780946B2 patent drawing

AI summary

An ultraviolet laser device equips a laser beam output unit that includes first, second and third amplifiers that output first through third infrared laser beams, and first through third optical systems into which the first through third infrared laser beams through which the first through third infrared laser beams are propagated. A wavelength conversion unit includes a fourth optical system into which the combined first through third laser beams are incident through which they are propagated. The first optical system wavelength converts and generates the first infrared laser beam to a predetermined harmonic wave as the first laser beam, the fourth optical system includes a first wavelength conversion element that generates an earlier stage ultraviolet laser beam between the predetermined harmonic wave and the second laser beam, and the second wavelength conversion element generates an ultraviolet laser beam between the earlier stage ultraviolet laser beam and the third laser beam.