Semiconductor Light-Emitting Electrode Structure for UV Reflectance Stability

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Solution Overview

Problem

Semiconductor light-emitting elements with n-side electrodes composed of Al without Au suffer from corrosion during energized use, leading to decreased ultraviolet reflectance and light output.

Innovation Solution

Incorporating a TiN layer in the n-side current diffusion layer over a wider region than the n-side contact electrode, and a p-side current diffusion layer with a stacked structure of TiN, metal, and TiN layers to maximize the light-emitting area and prevent corrosion, thereby maintaining reflectance and light output.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If the n-side electrode is formed using Al without Au, then the ultraviolet reflectance is increased, but the electrode is corroded during energized use resulting in lowered ultraviolet reflectance

Engineering Contradiction:
Improveultraviolet reflectanceVSAvoidelectrode corrosion resistance
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

The n-side contact electrode uses a composite structure of Ti and Al layers, where Ti provides corrosion resistance and Al provides high ultraviolet reflectance. This composite material approach resolves the contradiction by combining materials with complementary properties to achieve both high reflectance and corrosion resistance simultaneously.

Inventive Principle:
Principle #40Composite materials

2Area of stationary object

If the p-side contact electrode occupies maximum area on the upper surface of the p-type semiconductor layer, then the light-emitting layer area is maximized, but the current diffusion area is reduced

Engineering Contradiction:
Improvelight-emitting layer areaVSAvoidcurrent diffusion
Core Design Contradiction:
Area of stationary objectVSEase of manufacture

Solution Approach 1:

The current diffusion layer extends laterally beyond the vertical projection of the contact electrode, utilizing the horizontal dimension to provide current diffusion pathways without reducing the vertical contact area. This dimensional extension allows both maximum light-emitting area and sufficient current diffusion capability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The electrode structure is segmented into distinct functional layers: the contact electrode for electrical connection, the current diffusion layer for current distribution, and the light-emitting layer for photon generation. This segmentation allows each layer to be optimized for its specific function without compromising the others.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively suppresses corrosion of the n-side contact electrode and maintains high light output by maximizing the reflective area and preventing metal migration, ensuring stable performance during energized use.

Implementation Method 1

with the n-side current diffusion layer having the TiN layer provided on the n-side contact electrode over a region wider than the formation region of the n-side contact electrode, the n-side contact electrode may be suppressed from being corroded during energized use

Methodology Applied
Scientific EffectCorrosion resistance:

Implementation Method 2

the n-side contact electrode may be suppressed from being corroded during energized use. This successfully suppresses decrease in reflectance of the n-side contact electrode that functions as a reflective electrode, and suppresses the light output from declining during energized use

Methodology Applied
Scientific EffectUltraviolet reflectance: Reflection

Implementation Method 3

Each of the p-side current diffusion layer and the n-side current diffusion layer may have a stacked structure in which a TiN layer, a metal layer and a TiN layer are stacked in order

Methodology Applied
Scientific EffectStacked structure:

Implementation Method 4

maintaining reflectance and light output... preventing metal migration, ensuring stable performance during energized use

Methodology Applied
Scientific EffectMetal migration prevention:

Data Source

PatentUS11769860B2Semiconductor light-emitting element and method of manufacturing semiconductor light-emitting element
Publication Date: 2023.09.26 NIKKISO CO LTD
  • US11769860B2 patent drawing
  • US11769860B2 patent drawing
  • US11769860B2 patent drawing

AI summary

The semiconductor light-emitting element has an n-type semiconductor layer; an active layer provided on a first upper surface of the n-type semiconductor layer; a p-type semiconductor layer provided on the active layer; a p-side contact electrode provided in contact with the upper surface of the p-type semiconductor layer; a p-side current diffusion layer provided on the p-side contact electrode in a region narrower than a formation region of the p-side contact electrode; a p-side pad electrode provided on the p-side current diffusion layer; an n-side contact electrode provided in contact with a second upper surface of the n-type semiconductor layer; an n-side current diffusion layer provided on the n-side contact electrode over a region wider than a formation region of the n-side contact electrode, and including a TiN layer; and an n-side pad electrode provided on the n-side current diffusion layer.