Vacuum Ultraviolet Light Irradiation Spacer for Uniform Treatment
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Solution Overview
Problem
Existing light irradiating apparatuses using vacuum ultraviolet light struggle to achieve uniform treatment of workpieces due to deformation, leading to variations in the distance between the light source and the workpiece, which affects the intensity of the ultraviolet light and ozone concentration.
Innovation Solution
A light irradiating apparatus with a spacer between the light passing window and the workpiece applies a pressing force to maintain a uniform distance, ensuring consistent ultraviolet light intensity and ozone concentration across the workpiece surface, using a pressure adjustment mechanism and protrusions on the light passing window to correct deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If no spacer is used between the light passing window and the workpiece, then the device complexity is reduced, but the distance between the light passing window and the workpiece becomes non-uniform due to workpiece deformation, leading to non-uniform treatment
Solution Approach 1:
A spacer is introduced as an intermediary component between the light passing window and the workpiece. The spacer maintains a predetermined uniform distance, preventing direct contact and ensuring consistent gap size across the entire workpiece surface, thereby achieving uniform treatment despite workpiece deformation
Solution Approach 2:
The spacer is positioned in advance to establish the correct gap distance before light irradiation begins. This preliminary positioning ensures that the distance between the light passing window and the workpiece surface is uniformly maintained throughout the treatment process
2Device complexity
If the gap distance between the light passing window and the workpiece is non-uniform, then the device simplicity is maintained, but the ultraviolet light intensity and ozone concentration become non-uniform, affecting treatment quality
Solution Approach 1:
The spacer acts as a mechanical intermediary that enforces uniform gap distance, ensuring consistent ultraviolet light intensity distribution across the workpiece surface by preventing variations in distance that would cause intensity non-uniformity
3Device complexity
If the gap distance varies across the workpiece surface, then no additional components are needed, but the ozone concentration becomes non-uniform, leading to inconsistent treatment results
Solution Approach 1:
The spacer serves as a physical intermediary that maintains uniform gap distance, which in turn ensures uniform ozone concentration distribution across the workpiece surface, achieving precise and consistent treatment results
Solution Approach 2:
The spacer is pre-positioned to establish the correct and uniform gap distance before the treatment process begins, ensuring that ozone generation and distribution remain uniform throughout the treatment
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures uniform treatment by maintaining consistent ultraviolet light intensity and ozone concentration, effectively addressing the issue of workpiece deformation and enhancing treatment efficiency.
Implementation Method 1
an ultraviolet light emission lamp configured to emit vacuum ultraviolet light toward a workpiece
Implementation Method 2
a method with use of active oxygen such as ozone produced by vacuum ultraviolet light
Implementation Method 3
a spacer adapted to be disposed between the light passing window and the workpiece, to apply a pressing force onto the workpiece
Data Source
AI summary
A light irradiating apparatus that may include: an ultraviolet light emission lamp configured to emit vacuum ultraviolet light toward a workpiece to be disposed in an atmosphere of a treatment gas including oxygen; a light passing window adapted to be disposed between the workpiece and the ultraviolet light emission lamp and configured to allow the vacuum ultraviolet light from the ultraviolet light emission lamp to pass therethrough, in which the light passing window has a light-exiting surface; and a spacer adapted to be disposed between the light passing window and the workpiece, to apply a pressing force onto the workpiece and to form a gap that allows a distance from the light-exiting surface of the light passing window to a surface of the workpiece to be of a uniform size over the entire surface of the workpiece.