UV-Patterned Microfluidic Elastomer Channels for Thin Haptic Actuators

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Solution Overview

Problem

Conventional haptic actuators face challenges in bonding silicone layers due to low surface energy and hydrophobicity, leading to increased thickness and reduced output force or higher input voltage, necessitating the development of stretchable and cure-on-demand elastomeric films for improved actuator performance and tunable optical displays.

Innovation Solution

The fabrication of nano- and micro-size inflatable four-dimensional fluidic channels using ultraviolet patterning of B-stage elastomeric films, enabled by laser interference lithography and wafer aligning techniques, allows for high-resolution pattern formation and selective curing of elastomeric layers, creating ultra-stretchable actuators with customizable surface texture and tunable optical performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If additional adhesive layers are used to bond silicone layers, then bonding strength is improved, but device thickness increases and output force decreases

Engineering Contradiction:
Improvebonding strengthVSAvoiddevice thickness
Core Design Contradiction:
StrengthVSLength of moving object

Solution Approach 1:

The patent merges the bonding function and the elastomeric layer function into a single integrated structure. The B-stage elastomeric film serves both as the structural layer and as the bonding medium, eliminating the need for separate adhesive layers. This is achieved by creating direct bonds between B-stage elastomeric layers through UV curing, thereby reducing device thickness while maintaining bonding strength.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent extracts and eliminates the adhesive layer from the traditional multi-layer structure. By using B-stage elastomeric films that can be directly bonded through UV curing, the adhesive component is completely removed from the system, simplifying the structure and reducing overall thickness.

Inventive Principle:
Principle #2Taking out (Extraction)

2Strength

If adhesive layers are added to bond silicone layers, then bonding strength is improved, but input voltage increases

Engineering Contradiction:
Improvebonding strengthVSAvoidinput voltage
Core Design Contradiction:
StrengthVSUse of energy by moving object

Solution Approach 1:

The patent combines the bonding function with the elastomeric layer itself, eliminating adhesive layers that would increase device thickness. This reduction in thickness directly lowers the input voltage requirement for electrostatic actuators, as thinner gaps require less voltage to achieve the same electrostatic force.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

By removing adhesive layers from the structure, the patent reduces the overall device thickness. This extraction of unnecessary layers directly contributes to lowering the input voltage requirement, since electrostatic actuator voltage is proportional to the gap distance between moving and stationary electrodes.

Inventive Principle:
Principle #2Taking out (Extraction)

3Ease of manufacture

If conventional silicone bonding is used, then ease of manufacture is maintained, but device thickness increases

Engineering Contradiction:
Improvebonding process simplicityVSAvoiddevice thickness
Core Design Contradiction:
Ease of manufactureVSLength of moving object

Solution Approach 1:

The patent replaces conventional mechanical bonding methods (which require adhesives and complex multi-step processes) with UV photopolymerization. The B-stage elastomeric film contains photopolymerizable groups that undergo curing when exposed to UV light, creating strong bonds without requiring additional adhesive materials or complex mechanical assembly steps.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent utilizes the unique property of B-stage elastomeric films that exist in an intermediate state between liquid precursor and fully cured rubber. This B-stage state allows the material to be patterned and bonded before final curing, enabling direct bonding without adhesives and reducing device thickness while maintaining manufacturing simplicity.

Inventive Principle:
Principle #35Parameter changes

4Strength

If adhesive layers are used for bonding, then bonding strength is improved, but actuator displacement decreases

Engineering Contradiction:
Improvebonding strengthVSAvoidactuator displacement
Core Design Contradiction:
StrengthVSLength of moving object

Solution Approach 1:

The patent merges the bonding function into the elastomeric layer itself, eliminating adhesive layers. This integration reduces the overall device thickness and eliminates the compliance introduced by adhesive layers, thereby maximizing actuator displacement while maintaining bonding strength through direct UV-cured bonds between B-stage elastomeric layers.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method enables the creation of complex soft fluidically actuated haptic displays with ultrafine tactile pressure feedback, customizable surface texture, and tunable optical displays, enhancing haptic sensation and actuator displacement while improving wearability and resolution.

Implementation Method 1

exposing the first film to a first actinic radiation in the presence of an additional monomer or oligomer thereby transferring the first repeating pattern to the first film

Methodology Applied
Scientific EffectPhotopolymerization: Photopolymerisation

Implementation Method 2

Laser interference lithography, wafer aligning techniques, and design of fluidic actuators

Methodology Applied
Scientific EffectOptical interference: Interference

Data Source

PatentUS12493242B2Fabrication of micro/nano-fluidic channels through ultraviolet patterning
Publication Date: 2025.12.09 META PLATFORMS TECHNOLOGIES LLC
  • US12493242B2 patent drawing
  • US12493242B2 patent drawing
  • US12493242B2 patent drawing

AI summary

Methods for making a B-stage thiol-cured urethane acrylate elastomeric film are provided. At least a urethane acrylate oligomer, a multifunctional thiol, and a base catalyst are combined to form a thiol terminated B-stage elastomer. The thiol terminated B-stage elastomer is exposed to an ultraviolet photoinitiator in the presence of an allyl ether terminated urethane to form the B-stage thiol-cured urethane acrylate elastomeric film. In some embodiments the B-stage thiol-cured urethane acrylate elastomeric film is used for a soft actuator application such as a fluidic elastomer actuator application or an electrostatic zipping actuator application.