Deep Ultraviolet Raman Spectrometer for Sub-Micron Semiconductor Imaging
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Solution Overview
Problem
Conventional optical microscopes and Raman spectrometers face limitations in resolving small features due to the limitations of visible light, particularly in semiconductor research and manufacturing, where features smaller than 0.5 microns are challenging to observe, and the need for high-vacuum environments or complex light sources.
Innovation Solution
Utilizing the intense, monochromatic radiation of the Hydrogen Lyman-α line at 121.6 nm in the deep ultraviolet region, which allows for improved resolution and transmission through air without the need for a high vacuum, enabling the development of optical microscopes and Raman spectrometers that can effectively probe sub-micron features.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If visible light is used for optical microscopy, then the device is simple and easy to operate, but the resolution is insufficient for features smaller than 0.5 microns
Solution Approach 1:
The patent changes the wavelength parameter of light from visible range to deep ultraviolet range (121.6 nm), which directly improves resolution according to the diffraction limit formula. This parameter change enables observation of sub-0.5 micron features while maintaining optical microscopy simplicity
2Measurement precision
If deep ultraviolet light at 121.6 nm is used, then resolution increases four-fold, but atmospheric absorption would normally prevent transmission
Solution Approach 1:
The patent exploits the local quality feature of atmospheric transmission by identifying and utilizing the specific wavelength window at 121.6 nm where oxygen absorption has a local minimum. This allows deep ultraviolet light to transmit through air without requiring vacuum conditions, resolving the contradiction between improved resolution and atmospheric absorption
Solution Approach 2:
The patent uses the atmospheric window at 121.6 nm as an intermediary that mediates between the deep ultraviolet light source and the atmosphere. This natural transmission window acts as a bridge allowing VUV light to pass through air, eliminating the need for vacuum systems
3Measurement precision
If N VII radiation at 2.48 nm is used, then water absorption by biological specimens is reduced, but the light source requires complicated equipment and high vacuum
Solution Approach 1:
The patent replaces expensive, complex, and fragile deep VUV light sources (N VII radiation requiring pinched plasma sources and high-powered pulsed lasers) with a simpler, more reliable hydrogen discharge lamp. This substitution maintains the scientific benefit while eliminating the need for complicated equipment and high vacuum systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides a four-fold increase in resolution, allowing for enhanced viewing and probing of small features without the complexity and cost of traditional high-vacuum systems, and significantly improves Raman scattering intensity, enabling high-resolution imaging and spectroscopy of semiconductor devices.
Implementation Method 1
utilizing the intense, monochromatic radiation of the Hydrogen Lyman-α line at 121.6 nm in the deep ultraviolet region
Implementation Method 2
a hydrogen discharge lamp that produces intense ultraviolet radiation at the hydrogen Lyman-α line
Implementation Method 3
within which a local minimum in the absorption coefficient of Oxygen occurs
Implementation Method 4
a lens device that receives a first portion of the generated light, directs at least some of the first portion of the generated light toward a target location, receives reflected light from the target location, and directs the reflected light toward a further location
Implementation Method 5
the camera device receives a first amount of the reflected light, whereby an image is generated by the camera device based upon the first amount of the reflected light
Implementation Method 6
Raman spectroscopy, which employs Raman scattering
Data Source
AI summary
Apparatuses and methods for performing spectroscopy and optical microscopy are disclosed. In at least one embodiment, a Raman spectrometer includes a vacuum ultraviolet light source configured to generate light having a wavelength within a window in the vacuum ultraviolet region of the electromagnetic spectrum within which a local minimum in the absorption coefficient of Oxygen occurs. The spectrometer also includes a lens device that receives a first portion of the generated light, directs at least some of the first portion of the generated light toward a target location, receives reflected light from the target location, and directs the reflected light toward a further location. The spectrometer further includes a dispersive device that receives at least some of the reflected light and outputs dispersed light produced based thereupon, and a camera module that is positioned at additional location, where the camera module receives at least some of the dispersed light.