UWB Radar Robot Positioning in Process Chambers for Collision Prevention
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Solution Overview
Problem
Existing robot detection and control systems within semiconductor process chambers cannot accurately determine the position of a robot in real time, leading to potential collisions with obstacles and accidents during manual operation.
Innovation Solution
A robot detection and control system utilizing UWB radars to detect the robot's position within the chamber, comparing it with obstacle coordinates to ensure safe movement, and using a storage unit to store safety distances and obstacle maps for precise control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If robot position monitoring is implemented using traditional methods, then robot operation control is possible, but real-time position determination accuracy is insufficient
Solution Approach 1:
The patent replaces traditional mechanical position monitoring methods with electromagnetic wave-based UWB radar detection. The radar system uses time-of-flight measurement of electromagnetic waves to determine robot position, achieving high precision without complex mechanical sensors or encoders on the robot itself.
Solution Approach 2:
The patent introduces UWB radar as an intermediary detection device positioned in the chamber to monitor robot position. The radar acts as a mediator between the control system and the robot, providing non-contact position measurement that avoids adding complexity to the robot's mechanical structure.
2Reliability
If manual robot operation is used, then flexible control is achieved, but collision detection with obstacles is impossible
Solution Approach 1:
The patent implements a feedback mechanism where the UWB radar continuously measures robot position, the control system compares this with obstacle positions, and provides real-time feedback to prevent collisions. This closed-loop control enhances safety while maintaining manual operation flexibility.
Solution Approach 2:
The patent performs preliminary detection of obstacle positions and pre-calculates safe movement paths before the robot actually moves. By anticipating potential collision risks in advance and preparing preventive measures, the system ensures safety without interfering with manual operation until necessary.
3Productivity
If robot movement control is implemented without real-time position data, then simple control logic is maintained, but movement path optimization is impossible
Solution Approach 1:
The patent uses accumulated position data from multiple operations to pre-calculate optimized movement paths for future operations. By performing path optimization in advance based on historical data, the system improves productivity without requiring complex real-time decision-making during robot operation.
Solution Approach 2:
The patent creates a digital copy or model of the chamber environment including obstacle positions and robot movement patterns. This virtual model allows for simulation and optimization of movement paths without affecting the physical robot operation, separating the complexity of path optimization from real-time control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables real-time determination of the robot's position, preventing accidents and optimizing its movement path by accumulating data, thereby ensuring safe and efficient operation within the chamber.
Implementation Method 1
a position detection unit which detects a position of a robot moving in the chamber using data by the UWB radar
Implementation Method 2
a robot detection and control system within a chamber configured to include a UWB radar provided in the chamber
Data Source
AI summary
The present invention relates a robot detection and control system within a chamber capable of detecting a position of the robot within the chamber by using a plurality of UWB radars. To this end, the present invention provides a robot detection and control system within a chamber configured to include a UWB radar provided in the chamber; a position detection unit which detects a position of a robot moving in the chamber using data by the UWB radar; and a robot control unit which compares the position of the robot by the position detection unit with a position of an obstacle to control the movement of the robot. Therefore, according to the present invention, since the position of the robot within the chamber may be determined in real time, it is possible to determine whether the movement path of the robot is appropriate and prevent an emergency accident in advance.