V-Shape MEMS Mirror Frame for Automatic Alignment
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Solution Overview
Problem
The manual assembly of MEMS micromirrors in picoprojectors is slow, difficult, and error-prone, leading to suboptimal throughput and yield due to the need for precise alignment and fixing of horizontal and vertical micromirrors.
Innovation Solution
A mirror package design where two micromirrors are assembled on a metal frame with pre-bent V-shape supporting portions and electric connection structures, allowing for automatic positioning and alignment without human intervention, using a forming press similar to those in the semiconductor industry.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manual assembly of MEMS micromirrors is used, then alignment precision can be achieved, but assembly speed and productivity are reduced
Solution Approach 1:
The supporting portions of the metal frame are pre-bent into a V-shape configuration before micromirror assembly. This preliminary action establishes the correct angular relationship between horizontal and vertical micromirror mounting positions, enabling automatic alignment during assembly without requiring manual precision adjustment, thus resolving the contradiction between alignment precision and assembly speed
Solution Approach 2:
The V-shaped supporting portions are designed to automatically guide and position the micromirrors during assembly through their geometric configuration. The structure itself provides the alignment function that would otherwise require manual intervention, allowing the assembly process to be automated while maintaining precision through the self-aligning geometry of the pre-bent supports
2Manufacturing precision
If manual assembly of MEMS micromirrors is used, then precise positioning can be achieved, but assembly complexity and error rate increase
Solution Approach 1:
The metal frame's supporting portions are pre-bent into a specific V-shape geometry that encodes the correct spatial relationship between micromirror positions. This preliminary structuring transfers the positioning complexity from the assembly operation to the frame design stage, simplifying the actual assembly process while maintaining positioning precision through the predetermined geometric configuration
Solution Approach 2:
The pre-bent V-shaped supporting portions act as an intermediary structure that mediates between the metal frame and the micromirrors. This intermediary geometry automatically establishes correct positioning and angular relationships, reducing assembly complexity by eliminating the need for complex alignment procedures while ensuring precise positioning through its designed shape
Data Source
AI summary
The mirror group is formed by a monolithic frame bent along a bending line and including a first and a second supporting portions carrying, respectively, a first and a second chips forming two micromirrors made using MEMS technology. The first and second supporting portions are arranged on opposite sides of the bending line of the frame, angularly inclined with respect to each other. The mirror group is obtained by separating a shaped metal tape carrying a plurality of frames, having flexible electric connection elements. After attaching the chips, the frames are precut, bent along the bending line, and separated.