V-Shape Substrate Transfer Hand for Load Port Alignment
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Solution Overview
Problem
Conventional substrate transfer hands face difficulties in ensuring a sufficiently wide space to align the hand axis parallel to the insertion direction into substrate carriers without increasing the size of the substrate transfer and loading device, especially when located near the opening of the load port.
Innovation Solution
The substrate transfer hand is designed with a V-shape or U-shape configuration at the coupling portion of the base and substrate holding parts, allowing for rotation and offset adjustments to reduce the movement region and accommodate objects in tight spaces within the transfer room.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of stationary object
If the substrate transfer hand is positioned near the opening of the load port to reduce device size, then the volume of the transfer room is reduced, but it becomes difficult to ensure a sufficiently wide space to correct the posture of the substrate transfer hand so that the hand axis and insertion direction become parallel
Solution Approach 1:
The substrate transfer hand is designed with asymmetric configuration where the substrate holding part is offset from the hand axis. This asymmetry allows the hand to approach the load port opening at an angle while still aligning the substrate holding part with the insertion direction, eliminating the need for extensive posture correction space.
Solution Approach 2:
The invention introduces angular positioning as an additional degree of freedom. Instead of only moving the hand along the insertion direction axis, the hand can be positioned at various angles relative to the load port opening, with the offset configuration automatically providing the correct insertion orientation.
2Ease of manufacture
If the substrate transfer hand has a conventional symmetric configuration with base part and substrate holding part disposed in series along the hand axis, then the structure is simple and easy to manufacture, but a sufficiently wide space is required to correct the posture before insertion
Solution Approach 1:
The substrate transfer hand employs an asymmetric configuration where the substrate holding part is offset from the hand axis. This design maintains manufacturing simplicity while fundamentally changing the spatial requirements by eliminating the need for extensive posture correction space before insertion.
Solution Approach 2:
The offset configuration is built into the hand structure during manufacturing, preliminarily establishing the correct insertion orientation. This pre-configured asymmetry eliminates the need for complex real-time posture correction operations, simplifying both manufacturing and operation.
3Ease of operation
If the substrate transfer hand is positioned far from the load port opening to ensure adequate posture correction space, then sufficient alignment space is available, but the overall size of the substrate transfer and loading device increases
Solution Approach 1:
The asymmetric offset configuration allows the hand to be positioned closer to the load port while maintaining adequate alignment capability. The offset design provides built-in angular adjustment that replaces the need for extensive linear adjustment space.
Solution Approach 2:
The invention transitions from linear space requirements to angular positioning capabilities. By utilizing rotational degrees of freedom and offset configuration, the system achieves adequate alignment capability without requiring increased linear dimensions of the device.
Data Source
AI summary
A substrate transfer hand coupled to a robot arm includes a base part coupled to the robot arm; and a substrate holding part coupled to the base part to hold a substrate. When viewed in a substrate perpendicular line direction perpendicular to the substrate held by the substrate holding part, the substrate transfer hand is bent at a coupling portion at which the base part and the substrate holding part are coupled to each other or a region which is in the vicinity of the coupling portion, and the base part and the substrate transfer hand have a V-shape, as a whole.