Vacuum Chamber Acoustic Measurement via Vibration Feed-Through

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Solution Overview

Problem

Sound wave measurement is impossible in a vacuum chamber due to the absence of a medium to transmit sound waves, hindering the assessment of the deposition process in high-vacuum environments.

Innovation Solution

An acoustic measuring apparatus is installed in the vacuum chamber, comprising a sound wave collecting apparatus and a feed-through to convert sound wave information into electrical signals for analysis outside the vacuum.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If sound wave measurement is performed in a vacuum chamber, then the state of sound wave generation source can be determined, but sound wave measurement is impossible due to absence of medium to transmit sound waves

Engineering Contradiction:

Improvesound wave measurement capabilityVSAvoidabsence of transmission medium

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a solid medium (the wall of the vacuum chamber) as an intermediary to transmit vibrations from the sound wave generation source to the sound wave collecting apparatus. This mediator enables the transmission of mechanical vibrations through the vacuum barrier, allowing sound wave measurement without direct contact between the measurement device and the vacuum environment.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces the traditional acoustic measurement system (which requires air or gas medium) with a vibration-based measurement system. The sound wave collecting apparatus detects mechanical vibrations transmitted through the chamber wall, and the feed-through converts these vibrations into electrical signals, substituting mechanical vibration detection for acoustic wave detection.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If sound wave collecting apparatus is placed in contact with sound wave measurement site in vacuum chamber, then sound waves can be collected through solid medium, but the measuring apparatus must be positioned outside the vacuum chamber

Engineering Contradiction:

Improvesound wave collection capabilityVSAvoidapparatus positioning complexity

Core Design Contradiction:

Measurement precisionVSEase of operation

Solution Approach 1:

The patent divides the measurement system into two separate segments: the sound wave collecting apparatus remains inside the vacuum chamber to collect vibrations directly from the sound wave generation source, while the feed-through and analysis equipment are positioned outside the vacuum chamber. This segmentation allows each component to operate in its optimal environment while maintaining functional integration.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The feed-through acts as an intermediary component that bridges the vacuum and non-vacuum environments. It transmits mechanical vibrations from the sound wave collecting apparatus through the vacuum chamber wall to the external measurement equipment, enabling seamless data transfer without compromising the vacuum seal.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Loss of information

If feed-through is used to convert sound wave information into electrical signals, then sound wave information can be transmitted outside vacuum chamber, but additional conversion step is required

Engineering Contradiction:

Improvesound wave information transmissionVSAvoidsignal conversion process

Core Design Contradiction:

Loss of informationVSDevice complexity

Solution Approach 1:

The feed-through employs a transducer mechanism that converts mechanical vibrations into electrical signals, replacing the need for direct acoustic transmission. This substitution enables the transmission of sound wave information across the vacuum barrier by transforming the physical quantity from mechanical vibration to electrical signal, which can then be processed by external equipment.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the determination of the state of sound wave generation sources by converting vibrations into electrical signals for analysis, allowing for the diagnosis of abnormal noise and operation status of sound wave generation sources.

Implementation Method 1

The sound wave collecting apparatus may be configured to detect vibration of the inner wall of the vacuum chamber or the moving apparatus and to convert the vibration into a sound wave

Methodology Applied

Scientific EffectVibration detection and conversion: Vibration

Implementation Method 2

a feed-through configured to convert sound wave information of sound collected by the sound wave collecting apparatus into an electrical signal and to transmit the sound wave information outside the vacuum chamber

Methodology Applied

Scientific EffectSound wave to electrical signal conversion:

Data Source

PatentUS20260040015A1Apparatus and method for measuring acoustics in vacuum chamber

Publication Date: 2026.02.05 SAMSUNG DISPLAY CO LTD

AI summary

An acoustic measuring apparatus installed in a vacuum chamber to determine a state of a sound wave generation source in the vacuum chamber is provided. The acoustic measuring apparatus includes: a sound wave collecting apparatus in a vacuum chamber and configured to collect sound generated from a sound wave generation source in the vacuum chamber; and a feed-through configured to convert sound wave information of sound collected by the sound wave collecting apparatus into an electrical signal and to transmit the sound wave information outside the vacuum chamber.