Vacuum Bellows RF Actuator for Semiconductor Processing
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Solution Overview
Problem
Conventional semiconductor processing tools are inadequate to handle the increasing demands of smaller device feature sizes, high integration density, and stringent requirements for high vacuum environments with corrosive gases, particularly in terms of maintaining proper function, mean-time-to-failure, mean-time-to-clean, and mean-time-to-repair, especially during critical processes like silicon etching and in-situ processing.
Innovation Solution
A high frequency linear actuator with a vacuum bellows and an electrically conductive linear motion shaft that can move within the actuator body, capable of sealing between vacuum and atmosphere, and providing a low impedance path for RF or low frequency energy, ensuring reliable operation in harsh environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional actuator mechanism is used in a vacuum environment, then the structure is simple, but the reliability deteriorates due to vacuum sealing issues and corrosive gas exposure
Solution Approach 1:
The actuator is divided into separate vacuum-tight chambers with independent sealing mechanisms. The bellows structure segments the vacuum environment from the actuator mechanism, allowing each component to operate in its appropriate environment while maintaining overall reliability.
Solution Approach 2:
A bellows structure serves as an intermediary element between the vacuum environment and the actuator mechanism. This flexible sealing component transmits motion while maintaining vacuum integrity, protecting internal components from corrosive gases without requiring complete encapsulation.
2Reliability
If an electrically conductive shaft is used to provide RF energy path, then the electrical conductivity is improved, but the vacuum sealing deteriorates due to potential contamination and leakage paths
Solution Approach 1:
The bellows structure acts as a flexible vacuum barrier that accommodates shaft movement while preventing contamination. This flexible membrane allows the conductive shaft to move and transmit RF energy without creating a direct leakage path to the vacuum environment.
Solution Approach 2:
The design incorporates replaceable sealing elements and protective coatings on the conductive shaft that can be periodically replaced to maintain vacuum integrity, prioritizing long-term reliability over initial component cost.
3Adaptability or versatility
If the actuator operates in harsh vacuum and plasma environments, then the process capability is improved, but the mean-time-to-failure deteriorates due to corrosive gas exposure
Solution Approach 1:
The actuator employs composite material construction with corrosion-resistant coatings and vacuum-compatible materials. The combination of stainless steel, ceramic coatings, and specialized polymers creates a structure that withstands plasma exposure and corrosive gases while maintaining mechanical functionality.
Solution Approach 2:
The design incorporates protective barriers and sealing mechanisms that are pre-installed to protect components before exposure to harsh environments. These preventive measures include vacuum seals, protective coatings, and redundant sealing systems that extend component life in corrosive conditions.
4Object-affected harmful factors
If a vacuum bellows is added to seal the vacuum environment, then the vacuum sealing is improved, but the device complexity increases
Solution Approach 1:
The bellows structure serves multiple functions simultaneously: it provides vacuum sealing, accommodates linear motion, transmits mechanical force, and acts as an electrical insulator. This multi-functionality reduces the need for additional separate components, offsetting the initial complexity increase with functional consolidation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The actuator enables robust and efficient operation in semiconductor processing by maintaining a consistent electrical path for RF energy, enhancing process tool reliability and productivity, particularly in plasma-enhanced CVD and etching applications, while withstanding corrosive conditions.
Implementation Method 1
A vacuum bellows is concentrically located in the first portion of the actuator body and is configured to seal a vacuum environment communicated within the vacuum bellows from the second portion of the actuator body
Implementation Method 2
An electrically conductive portion of the linear motion shaft is concentrically located substantially within the vacuum bellows and electrically insulated from the vacuum bellows. The electrically conductive portion of the linear motion shaft is configured to receive and conduct a high frequency signal
Implementation Method 3
In a plasma-enhanced CVD (PECVD) process, a controlled plasma is formed to decompose and/or energize reactive species to produce the desired film
Implementation Method 4
A gas, such as argon, is introduced into the PVD system, typically maintained at a pressure between a few millitorr (mtorr) and about 100 mtorr, to provide a medium in which a glow discharge can be initiated and maintained
Data Source
AI summary
A linear actuator comprised of an actuator body having a first portion and a second portion, each arranged along a longitudinal axis of the actuator body. A vacuum bellows is concentrically located in the first portion and is configured to seal a vacuum environment from the second portion. A linear motion shaft is concentrically located substantially within the actuator body and is configured to move in a linear direction along the longitudinal axis. An electrically conductive portion of the shaft is concentrically located substantially within the vacuum bellows and electrically insulated therefrom and is configured to receive and conduct a signal. A lift force generating portion of the shaft is concentrically located substantially within the second portion. An electrical contact pad is electrically coupled to the conductive portion of the shaft and is configured to couple the signal to another surface upon activation of the shaft.