Vacuum Evaporation Boat Feeding Shift to Prevent Local Deformation
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Solution Overview
Problem
Existing vacuum evaporation methods face issues with local deformation of the evaporation boat due to creep deformation or corrosion, leading to a shortened lifetime, and the formation of by-products that affect evaporation rate and temperature gradients.
Innovation Solution
A vacuum evaporation method that involves displacing the front end of the wire-shaped evaporation material relative to the boat main body in the X and Y axes, using a high-melting point metal evaporation boat, and employing reinforcing plates and supporting means to distribute the load and prevent deformation and by-product deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the wire-shaped evaporation material is continuously fed to a fixed position on the bottom plate, then the evaporation process is simple and efficient, but local deformation occurs due to creep or corrosion, shortening the evaporation boat's lifetime
Solution Approach 1:
The patent applies the dynamics principle by making the feeding position of the evaporation material variable rather than fixed. The control unit adjusts the feeding position along the bottom plate during the evaporation process, distributing the thermal and mechanical stress across different locations. This prevents localized creep deformation and corrosion at a single point, thereby extending the evaporation boat's service life while maintaining continuous evaporation productivity.
2Productivity
If the evaporation material is fed at a high rate to maintain evaporation rate, then productivity is improved, but temperature gradients increase and by-products accumulate more rapidly
Solution Approach 1:
The patent dynamically adjusts the feeding position of the evaporation material during the process. By moving the feeding location along the bottom plate, the system distributes the heat input and material deposition across different areas, preventing excessive temperature gradients. This dynamic positioning allows maintaining high evaporation rates while improving temperature uniformity and reducing by-product accumulation at specific locations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method prolongs the evaporation boat's lifetime by preventing local deformation and maintaining a consistent evaporation rate, while minimizing temperature gradients and by-product accumulation.
Implementation Method 1
the boat main body is heated by Joule heat by applying electric power by power source across both the electrode mounting plate parts through electrode plates
Implementation Method 2
the evaporation material will be melted inside the containing part so as to get melted and spread therein
Data Source
AI summary
A vacuum evaporation method includes a vaporization step in which use is made of an evaporation boat including: a boat main body having a containing part of an evaporation material as an evaporation source; and electrode mounting plate parts respectively extending outward at both ends of the boat main body. A wire-shaped evaporation material is fed from above a bottom plate of the boat main body defining the containing part of the evaporation material, in a manner to come into contact with the bottom plate. Electric current is applied across both the electrode mounting plate parts in order to heat the boat main body, thereby evaporating the evaporation material inside the containing part. The vacuum evaporation method further includes a displacement step of continuously or intermittently displacing, while the wire-shaped evaporation material is being fed, a front end part of the wire-shaped evaporation material relative to the boat main body.