Vacuum Chamber Controller Cooling via Hermetic Housing
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Solution Overview
Problem
The challenge in lithographic apparatuses is to locate a controller physically near an actuator of an optical device within a vacuum chamber without substantial modification, while addressing the specific requirements and limitations imposed by the vacuum conditions on the electronics of the controller, which often results in increased costs and reduced reliability.
Innovation Solution
A hermetically sealed housing is used to accommodate the controller within the vacuum chamber, connected via a fluid cooling channel for thermal management and an electrical connection to the actuator, allowing the controller to be located near the optical device while maintaining reliable operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the controller is located physically near the actuator in the vacuum chamber, then real-time dynamic actuator performance is improved, but the controller becomes more expensive and less reliable due to vacuum condition requirements
Solution Approach 1:
The system is divided into two separate environments: the vacuum chamber containing the optical device and actuator, and the atmospheric environment containing the controller. The controller is physically separated from the vacuum chamber, allowing it to operate in atmospheric conditions where standard electronics can be used, thus improving reliability while maintaining real-time control capability through fast electrical connections.
Solution Approach 2:
A hermetically sealed housing acts as an intermediary barrier between the vacuum environment and the atmospheric environment. This housing contains the controller and maintains atmospheric pressure inside, while allowing electrical connections to pass through to the actuator in the vacuum chamber. The housing enables the controller to be positioned near the actuator for real-time control without exposing it to vacuum conditions.
2Speed
If the controller is located physically near the actuator in the vacuum chamber, then real-time dynamic actuator performance is improved, but the controller cost increases due to vacuum-compatible electronics requirements
Solution Approach 1:
The system is divided into two separate environments: the vacuum chamber containing the optical device and actuator, and the atmospheric environment containing the controller. The controller is physically separated from the vacuum chamber, allowing it to operate in atmospheric conditions where standard electronics can be used, thus improving reliability while maintaining real-time control capability through fast electrical connections.
Solution Approach 2:
A hermetically sealed housing acts as an intermediary barrier between the vacuum environment and the atmospheric environment. This housing contains the controller and maintains atmospheric pressure inside, while allowing electrical connections to pass through to the actuator in the vacuum chamber. The housing enables the controller to be positioned near the actuator for real-time control without exposing it to vacuum conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables the controller to be effectively cooled and protected from vacuum conditions, enhancing its reliability and performance without significant modifications, thus addressing the real-time dynamic actuator performance requirements.
Implementation Method 1
The housing is connected to an exterior wall of the vacuum chamber via a fluid cooling channel configured to cool the controller
Data Source
AI summary
A lithographic apparatus includes an illumination system configured to condition a radiation beam and a support constructed to support a patterning device. The patterning device is configured to impart the radiation beam with a pattern in its cross-section to form a patterned radiation beam. A substrate table is constructed to hold a substrate, and a projection system is configured to project the patterned radiation beam onto a target portion of the substrate. The projection system includes a vacuum chamber and a controller configured to control an actuator of an optical device arranged in the vacuum chamber. The vacuum chamber includes a hermetically sealed housing in which the controller is accommodated. The housing is provided with an electrical connection configured to electrically connect the controller to the optical device, and is connected to an exterior wall of the vacuum chamber via a fluid cooling channel configured to cool the controller.