Multi-Stage Vacuum Chamber Layout for Compact Differential Pumping
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Solution Overview
Problem
Existing vacuum chamber systems are complex and occupy a large footprint due to the use of multiple separate components and pumps, which complicates the operation at different vacuum levels required in apparatus like mass spectrometers.
Innovation Solution
A vacuum chamber module with a pump wall that accommodates a multi-stage vacuum pump and multiple vacuum chambers, where each chamber is partially defined by the pump wall and has pumping ports at different positions for fluid communication with the pump stages, allowing for a simpler and more compact arrangement by sharing components and reducing the overall size and power requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple separate vacuum pumps are used to maintain different vacuum levels in different chambers, then each chamber can be pumped independently, but the apparatus size and complexity increase significantly
Solution Approach 1:
The patent combines multiple vacuum pump functions into a single multi-stage vacuum pump unit. The pump has multiple stages (first stage, second stage, third stage) that can operate simultaneously to maintain different vacuum levels in different chambers. This merging approach reduces the number of separate pump components while maintaining the capability to independently control vacuum levels in multiple chambers through the staged architecture.
Solution Approach 2:
The multi-stage vacuum pump is designed with universal functionality to serve multiple chambers simultaneously. Each stage of the pump can be connected to different chambers, allowing a single pump unit to perform the function of multiple individual pumps. The pump structure includes multiple inlets and interstage connections that enable flexible configuration for different vacuum level requirements across multiple chambers.
2Adaptability or versatility
If multiple separate vacuum pumps are used, then each chamber can be evacuated independently, but the overall apparatus footprint becomes large
Solution Approach 1:
The patent implements a nested arrangement where the multi-stage vacuum pump is positioned centrally and chambers are arranged around it in a radial configuration. The pump structure is nested within the overall apparatus layout, with chambers surrounding the pump at different radial positions. This nesting approach allows multiple chambers to be evacuated independently while minimizing the overall footprint, as the pump serves as a central hub rather than having separate pump units distributed throughout the apparatus.
Solution Approach 2:
The patent transitions from a linear or distributed arrangement of separate pumps to a radial/dimensional arrangement where chambers are positioned around the central multi-stage pump. This spatial reorganization in another dimension (radial vs. linear) allows independent chamber evacuation while significantly reducing the linear footprint of the apparatus. The pumping ports are positioned at different circumferential positions on the pump to accommodate this radial layout.
3Productivity
If multiple separate vacuum pumps are used, then each chamber can be pumped, but the power consumption increases
Solution Approach 1:
The patent merges multiple pump functions into a single multi-stage vacuum pump unit, which reduces the total power consumption compared to operating multiple separate pumps. The shared motor and mechanical components of the multi-stage pump eliminate redundant power consumption that would occur with multiple independent pump units. The pump maintains the ability to service multiple chambers simultaneously while consuming less total power due to the consolidated design.
Solution Approach 2:
The multi-stage vacuum pump provides universal pumping capability for multiple chambers through its staged architecture. Instead of powering multiple separate pumps, a single multi-functional pump unit with multiple stages can service different chambers at different vacuum levels. This multi-functionality reduces the total energy input required while maintaining the productivity of pumping multiple chambers simultaneously or independently as needed.
Data Source
AI summary
A vacuum chamber module and an apparatus are disclosed. The vacuum chamber module comprises: a pump wall defining a recess shaped to receive a multi-stage vacuum pump; a plurality of vacuum chambers, each vacuum chamber being configured to be pumped by a respective stage of the multi-stage vacuum pump, each vacuum chamber being defined at least partially by a portion of the pump wall, each vacuum chamber having an pumping port located at a different circumferential position on the pump wall for fluid communication with the respective stage of the multi-stage vacuum pump. In this way, a module is provided which shares components, with the multi-stage pump at least partially accommodated within space otherwise occupied by the vacuum chambers and with the vacuum chambers located around the pump wall, which provides for a simpler and more compact arrangement.