Vacuum Chamber Lid Composite Frame and Plate Design

Solution Overview

Problem

Vacuum chambers for substrate processing, such as those used in semiconductor and solar cell fabrication, face deformation issues due to repeated changes between atmospheric and vacuum states, particularly when made from materials like aluminum that have low strength and are subjected to high temperatures.

Innovation Solution

A vacuum chamber design featuring a chamber lid with a frame made of high-strength metallic material, such as stainless steel, combined with plates of high heat conductivity material, like aluminum, which includes flow channels for cooling and a sealing mechanism to prevent deformation and thermal expansion issues.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the chamber lid is made of aluminum material, then heat conduction is improved, but structural strength deteriorates causing deformation under vacuum pressure and high temperature

Engineering Contradiction:

Improveheat conductionVSAvoidstructural strength

Core Design Contradiction:

TemperatureVSStrength

Solution Approach 1:

The chamber lid is constructed as a composite structure combining an aluminum plate (for heat conduction) with a stainless steel frame (for structural strength). The aluminum plate is coupled to the inner surface of the chamber lid, while the stainless steel frame forms the outer structure. This composite design allows the aluminum component to conduct heat effectively while the stainless steel frame provides the necessary mechanical strength to resist vacuum pressure and high temperature without deformation.

Inventive Principle:

Principle #40Composite materials

2Strength

If the chamber lid is made of high-strength metallic material, then structural strength is improved, but heat conduction deteriorates

Engineering Contradiction:

Improvestructural strengthVSAvoidheat conduction

Core Design Contradiction:

StrengthVSTemperature

Solution Approach 1:

The chamber lid is constructed as a composite structure combining an aluminum plate (for heat conduction) with a stainless steel frame (for structural strength). The aluminum plate is coupled to the inner surface of the chamber lid, while the stainless steel frame forms the outer structure. This composite design allows the aluminum component to conduct heat effectively while the stainless steel frame provides the necessary mechanical strength to resist vacuum pressure and high temperature without deformation.

Inventive Principle:

Principle #40Composite materials

3Device complexity

If the chamber lid structure is simplified, then device complexity is reduced, but deformation resistance deteriorates under repeated vacuum and atmospheric state changes

Engineering Contradiction:

Improvestructure complexityVSAvoiddeformation resistance

Core Design Contradiction:

Device complexityVSStability of the object's composition

Solution Approach 1:

The chamber lid is constructed as a composite structure combining an aluminum plate (for heat conduction) with a stainless steel frame (for structural strength). The aluminum plate is coupled to the inner surface of the chamber lid, while the stainless steel frame forms the outer structure. This composite design allows the aluminum component to conduct heat effectively while the stainless steel frame provides the necessary mechanical strength to resist vacuum pressure and high temperature without deformation.

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The chamber lid is divided into multiple components: a chamber lid body, an aluminum plate coupled to the inner surface, and a stainless steel frame. This segmentation allows each component to be optimized for its specific function - the aluminum plate for heat conduction and the stainless steel frame for structural strength - while working together to prevent deformation under repeated vacuum and atmospheric state changes.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design effectively prevents deformation of the vacuum chamber by utilizing a strong frame and heat-conductive plates, ensuring the chamber's longevity and maintaining its structural integrity during repeated vacuum and atmospheric state changes, while also providing efficient cooling to manage heat and reduce the risk of deformation.

Implementation Method 1

a chamber lid combined with the chamber body, wherein the chamber lid comprises: a frame having a plurality of openings; and a plurality of plates combined with the plurality of openings

Methodology Applied

Scientific EffectHeat conduction: Conduction (thermal)

Data Source

PatentUS8752580B2Vacuum chamber for processing substrate and apparatus including the same

Publication Date: 2014.06.17 JUSUNG ENG

AI summary

A vacuum chamber for processing a substrate includes: a chamber body; and a chamber lid combined with the chamber body, wherein the chamber lid comprises: a frame having a plurality of openings; and a plurality of plates combined with the plurality of openings.