Integrated Vacuum Chamber Temperature Control System
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Solution Overview
Problem
Current vacuum systems require time-consuming and costly bake out procedures for achieving ultrahigh vacuum, which involve elaborate external heating systems that need assembly and disassembly, and often require removing or cooling exterior equipment that cannot withstand high temperatures.
Innovation Solution
A temperature control system that integrates conduits thermally coupled to the vacuum chamber wall, a fluid pump, and both heating and cooling means, allowing for efficient heating and cooling of the vacuum chamber without the need for external heaters or disassembly of equipment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If elaborate external heating systems are used for bake out procedure, then heating capability is improved, but device complexity and assembly/disassembly requirements increase
Solution Approach 1:
The patent combines heating and cooling functions into a single integrated temperature control system with a common fluid circulation loop. The heating means and cooling means share the same pump, conduits, and fluid pathway, eliminating the need for separate external heating systems and reducing assembly/disassembly requirements while maintaining effective heating capability for bake out procedures.
2Temperature
If elaborate external heating systems are used for bake out procedure, then heating capability is improved, but assembly and disassembly time increase
Solution Approach 1:
The integrated temperature control system merges heating and cooling into a single permanent installation with shared components. The common fluid loop with integrated heating and cooling means eliminates the need for repeated assembly and disassembly of separate external heating systems, significantly reducing the time loss associated with setup and teardown while maintaining effective bake out capability.
3Temperature
If external heating systems are used, then heating capability is improved, but operational cost increases
Solution Approach 1:
The patent reduces operational costs by merging heating and cooling into a single integrated system with shared fluid circulation components. The common pump, conduits, and fluid pathway eliminate the need for multiple separate systems, reducing maintenance requirements, component failures, and overall operational expenses while maintaining effective heating capability for vacuum chamber bake out procedures.
4Temperature
If exterior equipment is removed or cooled, then heating capability is improved, but device complexity increases
Solution Approach 1:
The integrated temperature control system combines heating and cooling functions within a single permanent installation, eliminating the need to remove or separately cool exterior equipment. The common fluid circulation system with integrated heating and cooling means provides effective temperature control while maintaining simpler equipment configuration and reducing overall system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables easy, cost-effective, and time-efficient temperature control of vacuum chambers, allowing for both heating and cooling without the need for assembly or disassembly of temperature control components, thus reducing operational costs and time.
Implementation Method 1
temperature adjusting means comprising a heating means or both a heating means and a cooling means
Implementation Method 2
conduits which can be thermally coupled to a chamber wall of the vacuum chamber
Implementation Method 3
temperature adjusting means comprising a heating means or both a heating means and a cooling means
Implementation Method 4
conduits which can be thermally coupled to a chamber wall of the vacuum chamber
Implementation Method 5
a fluid pump, temperature adjusting means comprising a heating means or both a heating means and a cooling means, and tubing for fluidly connecting said conduits, fluid pump, and temperature adjusting means
Data Source
AI summary
The present invention relates to a temperature control system (10) for adjusting a temperature (60) of a vacuum chamber (102), the temperature control system (10) comprising conduits (20) which can be thermally coupled to a chamber wall (110) of the vacuum chamber (102), a fluid pump (50), temperature adjusting means (30) comprising a heating means (32) or both a heating means (32) and a cooling means (34), and tubing (52) for fluidly connecting said conduits (20), fluid pump (50), and temperature adjusting means (30), respectively. Further, the present invention relates to a vacuum system (100) with a vacuum chamber (102), the vacuum chamber (102) comprising a chamber wall (110) enclosing a vacuum volume (106), a vacuum pump system (104) connected to the vacuum chamber (102) for evacuating the vacuum volume (106), and a temperature control system (10) for adjusting a temperature (60) of a vacuum chamber (102). In addition, the present invention relates to a method of adjusting the temperature (60) of a vacuum chamber (102) of said vacuum system (100).