Vacuum Check Valve Sealing Without Elastomers
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Solution Overview
Problem
Existing non-return valves in vacuum systems face challenges in providing effective seals in harsh thermal and chemical environments, particularly in semiconductor applications where conventional elastomer-based seals degrade under high temperatures and corrosive conditions.
Innovation Solution
A non-return valve design featuring a baffle with a sloped aperture and a curved valve member that provides an effective seal without the need for compressible elastomeric materials, using metal or ceramic components with specific surface roughness and angles between 30° and 70° to ensure robust sealing across different orientations, and optionally employing a double check valve configuration to reduce leakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If elastomer-based seals are used in conventional non-return valves, then sealing effectiveness is improved, but resistance to high temperatures and corrosive environments deteriorates
Solution Approach 1:
The patent changes the material parameters from elastomer to metal or ceramic, and changes the sealing mechanism parameters from compressible seal to precisely machined mating surfaces with specific surface roughness (Ra 0.01-0.5 µm), enabling the valve to withstand high temperatures and corrosive environments while maintaining sealing effectiveness
Solution Approach 2:
The patent employs composite sealing approaches where metal or ceramic components with specific surface finishes are used in combination with precise geometric configurations (sloped aperture at 30°-70° angles, curved valve member surfaces) to achieve sealing performance comparable to elastomers but with enhanced thermal and chemical resistance
2Object-affected harmful factors
If metal or ceramic components are used instead of elastomers, then resistance to high temperatures and corrosive environments is improved, but sealing effectiveness deteriorates
Solution Approach 1:
The patent applies local quality by creating highly polished sealing surfaces (Ra 0.01-0.5 µm) specifically at the mating interfaces of the aperture and valve member, while the bulk metal or ceramic components provide thermal and chemical resistance. The localized surface quality enhancement ensures effective sealing without compromising the overall material advantages
Solution Approach 2:
The patent incorporates curved surfaces on the valve member that mate with the sloped aperture, creating conformal contact between sealing surfaces. This curvature ensures consistent contact pressure and reliable sealing across different orientations and operating conditions, compensating for the lack of compressibility in metal/ceramic materials
3Reliability
If a sloped aperture with angles between 30° and 70° is used, then sealing effectiveness across different orientations is improved, but device complexity increases
Solution Approach 1:
The patent employs asymmetric sloping of the aperture at specific angles (30°-70°) relative to the valve flow direction, creating a geometric configuration that ensures the curved valve member surface maintains conformal contact with the aperture across various orientations. This asymmetric geometry, while more complex than a simple circular opening, provides orientation-independent sealing reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves reliable sealing and reduced wear in vacuum systems by utilizing metal or ceramic components that are resistant to high temperatures and corrosive environments, while the double check valve configuration further minimizes backflow leakage by distributing pressure differentials across multiple valves.
Implementation Method 1
The pressure differences found within vacuum systems can be high and these require effective seals. The valve member and aperture are configured such that the valve member obscures the aperture and seals with the valve seat to impede a flow of fluid from an outlet end to an inlet end
Implementation Method 2
at least a portion of said surface of said baffle surrounding said aperture slopes inwardly towards said inlet end of said valve such that said aperture is smaller at said inlet end than it is at said outlet end; and wherein diametrically opposing portions of said sloped surfaces of said aperture subtend an angle of between 30° and 70°
Data Source
AI summary
A vacuum system non-return valve includes a baffle for extending across a flow path in the vacuum system and a valve member. The baffle has an aperture, a perimeter of the aperture has a valve seat. The valve member has a curved sealing surface configured to mate with the valve seat. The valve member and aperture are configured such that the valve member obscures the aperture and seals with the valve seat to impede a flow of fluid in a closed position and is displaceable in use to move away from the valve seat and allow a fluid flow in an open position; at least a portion of the surface of the baffle surrounding the aperture slopes towards the inlet end of the valve such that the aperture is smaller at the inlet end than it is at the outlet end.