Vacuum Chuck Sealing for Through-Hole Substrate Holding

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Solution Overview

Problem

Vacuum sucking and holding devices struggle to securely hold objects with through holes or flexures, as air inflow through these features prevents a vacuum state from being maintained, leading to positional displacement during processing or alignment tasks.

Innovation Solution

A sucking and holding device that incorporates vacuum suction means and suction assisting means, where the suction assisting device seals through holes and corrects flexures, allowing for effective vacuum suction and holding without positional displacement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If vacuum suction means is used to hold objects, then holding force is provided, but objects with through holes or flexures cannot be held securely due to air inflow

Engineering Contradiction:

Improveholding reliabilityVSAvoidapplicability to various objects

Core Design Contradiction:

ReliabilityVSAdaptability or versatility

Solution Approach 1:

A suction assisting device acts as an intermediary component between the vacuum suction means and the object. This device includes a suction contact portion that directly contacts the object surface (including through holes and flexures) to seal air leaks, while the suction receiving portion connects to the vacuum suction means. The intermediary device enables vacuum holding of objects that would otherwise be unsuitable for vacuum suction.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The suction assisting device is divided into distinct functional segments: a suction contact portion that interfaces with the object to prevent air inflow, and a suction receiving portion that connects to the vacuum source. This segmentation allows each part to perform its specific function optimally - sealing the object surface and transmitting vacuum force separately.

Inventive Principle:

Principle #1Segmentation

2Force

If rubber friction means is used to hold objects, then holding force is provided, but positional displacement occurs when large force is applied

Engineering Contradiction:

Improveholding forceVSAvoidpositional accuracy

Core Design Contradiction:

ForceVSManufacturing precision

Solution Approach 1:

The invention replaces the friction-based mechanical holding system with a vacuum-based holding system. Instead of relying on friction force between rubber and object, the vacuum suction creates a pressure difference that holds the object securely. This substitution eliminates positional displacement that occurs with friction-based holding when large forces are applied.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention changes the fundamental parameter of holding from friction force to pressure difference. By creating a vacuum environment (changing pressure parameters), the system achieves secure holding without the positional displacement issues inherent in friction-based systems. The suction assisting device enhances this by sealing air leaks that would compromise the pressure differential.

Inventive Principle:

Principle #35Parameter changes

3Shape

If frame fitting means is used to hold objects, then shape-specific holding is provided, but gaps require allowance that leads to positional displacement

Engineering Contradiction:

Improveshape compatibilityVSAvoidpositional accuracy

Core Design Contradiction:

ShapeVSManufacturing precision

Solution Approach 1:

The invention replaces the frame fitting mechanical system with a vacuum suction system enhanced by a suction assisting device. Instead of requiring precise geometric fitting with allowance gaps, the vacuum system creates uniform holding force across the object surface. The suction contact portion adapts to various shapes while maintaining sealing, eliminating the need for shape-specific frames with clearance gaps.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device securely holds various objects, including those with through holes or flexures, by sealing air leaks and maintaining a vacuum, preventing positional displacement during processing and alignment tasks, and enabling efficient handling in manufacturing processes.

Implementation Method 1

vacuum suction and holding means for vacuum-sucking and holding an object to be sucked and held

Methodology Applied

Scientific EffectVacuum: Vacuum

Implementation Method 2

a vacuum state (reduced-pressure state) cannot be produced between the support plate and the vacuum sucking and holding device

Methodology Applied

Scientific EffectPressure difference: Pressure Gradient

Implementation Method 3

suction assisting means for sandwiching the object between it and the vacuum suction and holding means

Methodology Applied

Scientific EffectSealing: Physical Containment

Data Source

PatentUS8297568B2Sucking and holding device

Publication Date: 2012.10.30 AIMECHATEC LTD

AI summary

A sucking and holding device includes: a vacuum chuck for vacuum-sucking a substrate; and a suction assisting device for sandwiching the object between it and the vacuum chuck. The suction assisting device includes a substrate-facing surface. The substrate-facing surface seals a through hole provided in the substrate. With this configuration, the sucking and holding device can vacuum-suck and hold the substrate having a through hole. This leads to an accomplishment of a device which can hold various objects without positional displacement.