Vacuum Cluster Tool Consumable Part Replacement Mechanism
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Solution Overview
Problem
Current methods for replacing consumable parts in semiconductor wafer manufacturing require cluster tools to be taken offline, exposed to atmospheric conditions, and involve time-consuming processes that risk contamination and hardware damage, impacting production efficiency and profit margins.
Innovation Solution
A cluster tool assembly with a replacement station that allows for the removal and replacement of consumable parts without breaking vacuum, using a robot and lift mechanism to access and exchange parts within the process module, maintaining the system in a vacuum state to prevent contamination and minimize hardware damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the cluster tool is taken offline and exposed to atmospheric conditions for part replacement, then the consumable part can be replaced, but the reconditioning time increases and production efficiency decreases
Solution Approach 1:
The patent maintains the cluster tool chamber in a vacuum state during consumable part replacement, avoiding exposure to atmospheric conditions. The robot and lift mechanism operate within the vacuum environment to remove and install parts without breaking the vacuum seal, thereby eliminating the time-consuming pump-down and qualification processes that would otherwise be required.
2Ease of operation
If the cluster tool is opened to atmospheric conditions for part replacement, then the consumable part can be accessed, but the risk of contamination and hardware damage increases
Solution Approach 1:
The patent maintains the cluster tool chamber in a vacuum state during consumable part replacement, avoiding exposure to atmospheric conditions. The robot and lift mechanism operate within the vacuum environment to remove and install parts without breaking the vacuum seal, thereby eliminating the time-consuming pump-down and qualification processes that would otherwise be required.
Solution Approach 2:
The patent employs a robot with a lift mechanism that automatically performs the consumable part replacement within the vacuum chamber. The system serves itself by using automated machinery rather than requiring human technicians to open the chamber and manually replace parts, thereby maintaining the vacuum seal and eliminating contamination risks associated with atmospheric exposure.
3Manufacturing precision
If a robot and lift mechanism are used for part replacement in vacuum, then the alignment precision improves, but the device complexity increases
Solution Approach 1:
The patent replaces manual mechanical operations with an automated robot system equipped with a lift mechanism. The robot can precisely position and align consumable parts during replacement operations within the vacuum chamber, achieving superior alignment precision compared to manual methods. The lift mechanism provides controlled vertical movement to facilitate part installation and removal.
Data Source
AI summary
A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.