Vacuum Coating Device Double-Sided Processing

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Solution Overview

Problem

Existing vacuum coating devices can only coat one side of an object at a time, requiring the object to be flipped and exposed to air, leading to potential contamination and reduced performance due to exposure to water vapor, oxygen, and dust.

Innovation Solution

A vacuum coating device with multiple interconnected chambers and a loading plate conversion chamber allows for double-sided coating within a closed production line, using a loading plate apparatus and heating/spraying apparatus to maintain a controlled environment, eliminating the need for manual flipping and reducing contamination risks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the object to be coated is flipped manually to coat both sides, then both sides can be coated, but the object comes into contact with air causing contamination from water vapor, oxygen, and dust

Engineering Contradiction:
Improvedouble-sided coating capabilityVSAvoidcontamination from air exposure
Core Design Contradiction:
Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The production line is divided into multiple sealed vacuum chambers (first coating chamber, second coating chamber, loading plate conversion chamber) connected by transfer mechanisms. Each chamber maintains independent vacuum conditions, allowing the object to be coated on one side in one chamber and flipped to coat the other side in another chamber without exposure to atmospheric contamination.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent creates an inert vacuum environment throughout the entire coating process by sealing all chambers and maintaining negative pressure. This inert atmosphere prevents water vapor, oxygen, and dust from contacting the object during flipping and transfer operations, eliminating contamination while enabling double-sided coating.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

2Adaptability or versatility

If the object is taken out of the production line and flipped, then both sides can be coated, but production efficiency decreases due to additional handling time

Engineering Contradiction:
Improvedouble-sided coating capabilityVSAvoidproduction efficiency
Core Design Contradiction:
Adaptability or versatilityVSProductivity

Solution Approach 1:

The patent implements continuous automated flipping and coating operations within the sealed vacuum environment. The loading plate conversion chamber automatically flips objects between coating cycles, and multiple chambers operate in sequence without interruption, eliminating idle time associated with manual removal and reinsertion of objects, thereby maintaining high production efficiency while achieving double-sided coating.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The patent combines the flipping mechanism and coating chambers into an integrated vacuum system. The loading plate conversion chamber serves dual purposes: it flips the object and maintains vacuum conditions during the transition, merging what would otherwise be separate operations into a single continuous process that preserves both efficiency and coating quality.

Inventive Principle:
Principle #5Merging (Combining)

3Object-affected harmful factors

If multiple coating chambers are connected in sequence, then double-sided coating can be achieved in a closed line, but device complexity increases

Engineering Contradiction:
Improvecontamination preventionVSAvoidnumber of vacuum chambers and connections
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent designs each vacuum chamber to serve multiple functions: coating chambers perform deposition while maintaining vacuum, the loading plate conversion chamber performs both object flipping and vacuum maintenance, and transfer mechanisms serve both as physical connectors and vacuum seals. This multi-functionality reduces the need for additional specialized components, managing system complexity while achieving contamination-free double-sided coating.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables high-quality double-sided coating without exposing the object to air, improving production efficiency, reducing equipment costs, and enhancing the vacuum chamber's sealing performance and maintenance efficiency.

Implementation Method 1

a heating apparatus, configured to heat the processing chamber to a temperature reaching a reaction temperature of the object to be coated and the processing gas

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 2

a spraying apparatus, disposed within the processing chamber, and configured to spray a processing gas

Methodology Applied
Scientific EffectSpray: Spray

Data Source

PatentUS20240181485A1Vacuum coating device
Publication Date: 2024.06.06 LAPLACE (WUXI) SEMICON TECH CO LTD
  • US20240181485A1 patent drawing
  • US20240181485A1 patent drawing
  • US20240181485A1 patent drawing

AI summary

Disclosed is a vacuum coating device, including a heating apparatus, a loading plate apparatus, a spraying apparatus, a processing chamber and a plurality of valve chambers. The heating apparatus is configured to heat the processing chamber to a temperature that reaches a reaction temperature of the object to be coated and the processing gas, the loading plate apparatus is configured to load the object to be coated, the processing chamber includes a first coating vacuum chamber, a second coating vacuum chamber and a loading plate conversion vacuum chamber, and the loading plate conversion vacuum chamber is configured to convert a coating surface of an object to be coated to achieve a function of coating both sides of the object to be coated on a closed production line, and to improve production quality of the object to be coated.