Vacuum Coating Chamber Heat Shield for Wide Temperature Control
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Solution Overview
Problem
Existing coating chambers are limited in their ability to maintain flexible temperature ranges for various substrates and coatings, leading to inefficiencies and increased costs due to the need for multiple chambers or complex conversions when switching between different substrate or coating types.
Innovation Solution
A double-walled coating chamber with a heat shield system that includes interchangeable radiation shields and shielding shields, allowing for adjustable heat exchange coefficients and temperature control using water or oil, enabling operation across a wide temperature range without complex modifications.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a single coating chamber is used for multiple substrate types and coating processes, then versatility is improved, but temperature control flexibility deteriorates due to inability to maintain different temperature ranges for different processes
Solution Approach 1:
The coating chamber is segmented into multiple zones with independent temperature control capabilities. Different regions of the chamber wall can be independently heated or cooled, allowing simultaneous maintenance of different temperature ranges for different substrates or process stages within the same chamber.
Solution Approach 2:
The chamber employs dynamic temperature control systems that can adjust heating and cooling rates in real-time based on process requirements. Temperature zones can be dynamically reconfigured between processes, enabling the chamber to adapt from low-temperature coating to high-temperature annealing without physical modifications.
2Temperature
If multiple coating chambers are used for different temperature ranges, then temperature control flexibility is improved, but device complexity and cost increase
Solution Approach 1:
The coating chamber is designed as a universal multi-functional system that can perform low-temperature coating, high-temperature coating, and intermediate temperature processes within a single chamber. The chamber incorporates interchangeable components and adjustable configurations that enable it to serve multiple temperature-dependent functions without requiring separate dedicated chambers.
Solution Approach 2:
The chamber utilizes controllable parameter changes in its thermal management system, including adjustable heating power, variable cooling rates, and modifiable atmosphere composition. These parameter adjustments allow the same physical chamber to operate across different temperature ranges and process conditions, eliminating the need for multiple fixed-purpose chambers.
3Productivity
If chamber walls are made smooth to reduce pumping time, then productivity is improved, but heat dissipation capability deteriorates
Solution Approach 1:
Different regions of the chamber wall are given different surface characteristics optimized for their specific functions. Areas requiring rapid pumping have smooth surfaces to minimize gas adsorption, while areas requiring heat dissipation have enhanced thermal properties. This local differentiation allows the chamber to achieve both fast pumping and effective cooling without compromise.
Solution Approach 2:
The chamber wall employs composite material construction combining layers with different properties. Smooth outer surfaces facilitate rapid pumping, while internal layers provide enhanced thermal conductivity or heat capacity for effective heat dissipation. The composite structure integrates the benefits of both smooth and thermally active surfaces in a single chamber wall system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables flexible operation across a wide temperature range, reducing process times and costs by allowing multiple substrates and coatings to be processed in a single chamber without the need for complex conversions, while maintaining controlled heat dissipation to prevent overheating.
Implementation Method 1
a heat shield (3) arranged on a temperature-controlled chamber wall (2) of the coating chamber (1), which serves to control the exchange of a predefinable amount of thermal radiation between the heat shield (3) and the temperature-controlled chamber wall (2)
Implementation Method 2
a chamber wall (2) through which heat can be dissipated from the treatment area
Data Source
Figure 1
Figure 2
Figure 3
AI summary
The invention relates to a coating chamber (1) for implementing a vacuum-assisted coating process, in particular a PVD or CVD or arc coating chamber or hybrid coating chamber. The coating chamber (1) comprises a heat shield (3, 31, 32, 33), which is arranged on a temperature-controllable chamber wall (2) of the coating chamber (1) and is intended for adjusting an exchange of a predeterminable amount of thermal radiation between the heat shield (3, 31, 32, 33) and the temperature-controllable chamber wall (2). According to the invention, the heat shield (3, 31, 32, 33) comprises at least one exchangeable radiating shield (31), which is directly adjacent to an inner side (21) of the chamber wall (2), wherein a first radiating surface (311) of the radiating shield (31) that is directed towards the chamber wall (2) has a first predeterminable heat exchange coefficient (εD1) and a second radiating surface (312) of the radiating shield (31) that is directed away from the chamber wall (2) has a second predeterminable heat exchange coefficient (εD2), wherein the first exchange coefficient (εD1) is greater than the second heat exchange coefficient (εD2). The invention also relates to a heat shield for a coating chamber and to a coating process.