Vacuum Transfer of Chamber Consumables With Position-Corrected Replacement

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Solution Overview

Problem

Existing systems face inefficiencies in replacing consumable members in processing chambers, particularly in plasma processing environments, leading to operational disruptions and resource wastage.

Innovation Solution

A processing system with a storage module, position detection sensor, and vacuum transfer module, controlled by a controller, to efficiently manage the transfer and replacement of consumable members, such as edge rings, by detecting their position and adjusting their placement accurately.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If manual replacement of consumable members is performed, then operational flexibility is maintained, but replacement time increases and productivity decreases

Engineering Contradiction:

Improvereplacement efficiencyVSAvoiddowntime

Core Design Contradiction:

ProductivityVSLoss of time

Solution Approach 1:

The system enables automatic self-service replacement of consumable members through the transfer robot that autonomously transfers consumable members between storage and processing chambers without human intervention, resolving the contradiction by eliminating manual operations while maintaining continuous productivity

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The storage module pre-stores multiple consumable members in advance, and the system automatically selects and transfers the appropriate consumable member when needed, enabling seamless replacement without waiting for manual preparation and thus reducing downtime while improving productivity

Inventive Principle:

Principle #10Preliminary action

2Reliability

If consumable members are replaced frequently, then processing quality is maintained, but operational disruptions increase

Engineering Contradiction:

Improveprocessing qualityVSAvoidoperational continuity

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The automated transfer system operates continuously without interrupting the main processing workflow, allowing consumable members to be replaced at optimal intervals while maintaining processing quality and operational continuity simultaneously through seamless background operations

Inventive Principle:

Principle #20Continuity of useful action

Solution Approach 2:

The position detection sensor provides feedback on the state and location of consumable members, enabling the controller to determine the optimal replacement timing based on actual conditions, thus maintaining processing quality while minimizing operational disruptions through data-driven decision making

Inventive Principle:

Principle #23Feedback

3Manufacturing precision

If precise position detection is implemented, then placement accuracy improves, but system complexity increases

Engineering Contradiction:

Improveplacement accuracyVSAvoidsystem complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The system replaces complex mechanical positioning mechanisms with a position detection sensor and controller that use detection and calculation to achieve precise placement, substituting mechanical complexity with sensor-based measurement and computational control

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The position detection sensor creates a digital copy or representation of the consumable member's position, which the controller then uses to calculate and achieve precise placement without requiring complex mechanical positioning systems

Inventive Principle:

Principle #26Copying

4Productivity

If automated transfer systems are used, then replacement speed increases, but risk of contamination increases

Engineering Contradiction:

Improvereplacement speedVSAvoidcontamination risk

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The vacuum transfer module operates in a vacuum or controlled atmosphere environment, creating an inert protective environment that prevents contamination during the automated transfer process while maintaining high replacement speed through automated operations

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Facilitates precise and timely replacement of consumable members, reducing downtime and minimizing contamination, thereby optimizing the processing system's efficiency and resource utilization.

Implementation Method 1

a vacuum transfer module connected to the chamber and the storage module

Methodology Applied

Scientific EffectVacuum: Vacuum

Data Source

PatentUS12557585B2Processing system and transfer method

Publication Date: 2026.02.17 TOKYO ELECTRON LTD

AI summary

A processing system includes: a chamber in which a consumable member is installed; a storage module configured to store the consumable member; a position detection sensor configured to detect a position of the consumable member; a vacuum transfer module connected to the chamber and the storage module, the vacuum transfer module having a transfer robot configured to transfer the consumable member between the chamber and the storage module; and a controller. The controller performs processes of: (a) controlling transfer robot to transfer consumable member installed in the chamber to the storage module; (b) detecting position of the consumable member transferred to the storage module by the position detection sensor; and (c) controlling transfer robot to transfer a new consumable member different from the consumable member from the storage module to the chamber at a position adjusted based on the position of the consumable member detected in the process (b).