Vacuum Cover Pillar Support for Film Thickness Uniformity
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Solution Overview
Problem
Conventional substrate processing apparatuses face challenges in maintaining the ceiling portion of the vacuum container during vacuum exhaustion and performing maintenance due to the lack of a suitable support structure, which can lead to transformation of the ceiling portion and affect film thickness consistency.
Innovation Solution
A substrate processing apparatus with a detachable cover part and a pillar that penetrates through the rotary table to support the cover part, preventing transformation during vacuum exhaustion and facilitating easy maintenance by allowing the cover part to be opened and closed, thereby maintaining the vacuum container's integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a pillar is installed to support the ceiling portion during vacuum exhaustion, then the ceiling transformation is prevented, but the maintenance complexity increases due to the integrated structure
Solution Approach 1:
The support structure is segmented into a fixed base portion attached to the container bottom and a movable pillar portion that can be independently removed. This allows the pillar to be detached for maintenance while the base remains in place, resolving the contradiction between structural stability and maintenance accessibility.
Solution Approach 2:
The pillar is designed with dynamic characteristics, allowing it to be moved between an installed position (providing support during vacuum exhaustion) and a removed position (enabling maintenance). This dynamic capability resolves the contradiction by allowing the structure to adapt between operational and maintenance states.
2Ease of repair
If the cover part is made detachable for easy maintenance, then the maintenance ease is improved, but the structural support during vacuum exhaustion may be compromised
Solution Approach 1:
The support function is segmented from the cover part and transferred to the pillar structure with the fixed base. This allows the cover to be fully detachable for maintenance while the pillar-base combination provides continuous support during vacuum exhaustion, resolving the contradiction between maintainability and structural stability.
3Stability of the object's composition
If the pillar penetrates through the rotary table, then the ceiling support is improved, but the manufacturing complexity increases
Solution Approach 1:
The pillar structure is segmented into the fixed base portion and the movable pillar portion, with the rotary table positioned between them. This segmentation allows each component to be manufactured and assembled separately, reducing overall manufacturing complexity while maintaining the support function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents the transformation of the cover part, maintains film thickness consistency, and simplifies maintenance by allowing easy access to the interior of the vacuum container, enhancing the operational reliability of the apparatus.
Implementation Method 1
A ceiling portion of the vacuum container may be transformed by a difference in pressure between the outside of the vacuum container which is in an atmospheric environment and the inside of the vacuum container which has been vacuum-exhausted
Data Source
AI summary
There is provided a substrate processing apparatus of performing a process by supplying a processing gas on a substrate while rotating the substrate mounted on a rotary table in a vacuum container, which includes: a container main body used as a part including a bottom portion of the vacuum container; a cover part configured to be detachably installed with respect to the container main body to open and close the container main body, the cover part being used as a part including a ceiling portion of the vacuum container; a pillar installed in one of the cover part and the container main body such that the pillar penetrates through a central portion of the rotary table when the cover part is installed on the container main body, and configured to support the cover part with respect to the container main body when the inside of the vacuum container is vacuum-exhausted.