Vacuum Cutoff Filter Structure for Particulate Pump Protection
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Solution Overview
Problem
In existing low-pressure vacuum process devices, particulate by-products accumulate in the vacuum system and vacuum pump, affecting normal operation and leading to potential machine downtime and increased maintenance costs.
Innovation Solution
A vacuum system incorporating a cutoff member with a filter portion and a carrier portion, where the filter portion includes a passage that communicates with an accommodation groove, effectively cutting off particulate matters from the gas before they enter the vacuum pump, preventing them from accumulating and ensuring the vacuum pump operates normally.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the vacuum system operates without a cutoff member, then the structure remains simple, but particulate by-products accumulate in the vacuum pump affecting normal operation
Solution Approach 1:
A cutoff member is introduced as an intermediary component between the exhaust pipeline and the vacuum pump. This cutoff member includes a filter portion with filtering elements that intercept particulate by-products before they reach the vacuum pump, while the carrier portion collects these particles. The intermediary structure protects the vacuum pump without significantly complicating the overall system.
Solution Approach 2:
The cutoff member is segmented into distinct functional portions: a filter portion containing filtering elements for capturing particles, and a carrier portion for collecting and storing the intercepted particulate by-products. This segmentation allows each component to perform its specific function efficiently while maintaining a relatively simple overall structure.
2Productivity
If particulate by-products are allowed to enter the vacuum pump, then the system structure remains simple, but machine downtime increases due to maintenance requirements
Solution Approach 1:
The cutoff member performs preliminary filtration action by capturing particulate by-products in the carrier portion before they can enter and accumulate in the vacuum pump. This preliminary interception prevents the harmful accumulation that would lead to maintenance requirements and machine downtime, ensuring continuous productive operation.
3Ease of manufacture
If no filtration is implemented, then the vacuum system structure remains simple, but maintenance costs increase due to particulate accumulation
Solution Approach 1:
The cutoff member serves as a cost-effective intermediary solution that intercepts particulate by-products at a lower cost point in the system. By placing the filter and carrier portions in the exhaust pipeline before the vacuum pump, the system prevents particle accumulation that would otherwise require expensive maintenance and replacement of vacuum pump components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution prevents particulate matters from entering the vacuum pump, reducing machine downtime, lowering maintenance costs, and improving the overall service performance of the vacuum system by efficiently filtering and storing particulate by-products.
Implementation Method 1
the cutoff member includes a filter portion and a carrier portion, the filter portion includes a passage
Data Source
AI summary
The present disclosure relates to the technical field of semiconductors, and provides a vacuum system, a low-pressure vacuum process device, and a cutoff member. The vacuum system includes: a vacuum pump; an exhaust pipeline, wherein one end of the exhaust pipeline is used to communicate with a chamber to be evacuated, and the other end of the exhaust pipeline communicates with the vacuum pump; and a cutoff member, wherein the cutoff member is connected to the exhaust pipeline, the cutoff member includes a filter portion and a carrier portion, the filter portion includes a passage, the carrier portion includes an accommodation groove, and the passage communicates with the accommodation groove.